Wafer Mounting Table Cam Drive for Low-Cost Precise Rotation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional mounting devices with rotational driving mechanisms for semiconductor wafers require precise and costly link mechanisms and high-priced linear bush/spline shafts, increasing installation complexity and costs.
Innovation Solution
A simplified rotational driving mechanism using a driving shaft, moving body, cam followers, and a resilient member, such as a coil spring, to convert linear movement into rotational movement of the mounting table, reducing the need for complex link mechanisms and expensive components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a link mechanism is used to convert linear movement to rotational movement, then the mounting table can be rotated within a predetermined angle, but the device complexity and manufacturing cost increase
Solution Approach 1:
The patent extracts and eliminates the complex link mechanism from the system. Instead of using a link mechanism to convert linear movement to rotational movement, the invention uses a simplified approach where the moving body directly rotates the mounting table through a cam follower that converts linear motion to rotational motion, removing unnecessary intermediate components.
Solution Approach 2:
The patent replaces the conventional mechanical link mechanism with a cam follower system. The cam follower converts linear movement of the moving body into rotational movement of the mounting table through a cam surface, eliminating the need for complex linkages and reducing overall mechanical complexity.
2Manufacturing precision
If a high-priced linear bush or spline shaft is used for the elevation mechanism, then the mounting table can be raised and lowered precisely, but the manufacturing cost increases
Solution Approach 1:
The patent replaces expensive linear bushes or spline shafts with a more economical cam follower system. The cam follower uses a cam surface that guides the mounting table's vertical movement, providing sufficient precision without requiring high-cost components like linear bushes or spline shafts.
Solution Approach 2:
The patent changes the mechanical parameters of the elevation mechanism by using a cam surface instead of traditional linear guide elements. The cam surface geometry provides the necessary guidance and precision for vertical movement while being more cost-effective to manufacture than linear bushes or spline shafts.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a cost-effective mounting device with a simplified structure that effectively rotates the mounting table within a predetermined angle, lowering installation costs and maintaining precision.
Implementation Method 1
a resilient member for connecting the mounting table and the moving body so as to bring the first cam follower and the second cam follower into elastic contact with each other
Data Source
AI summary
A mounting device includes a vertically movable mounting table for mounting thereon a target object and a rotational driving mechanism for rotating the mounting table within a predetermined angle. The mounting table is vertically raised and rotated by the rotational driving mechanism. The rotational driving mechanism includes a driving shaft extending in a tangential direction of the mounting table and a moving body moving in the tangential direction via the driving shaft. A first cam follower is attached in perpendicular to the moving body and a second cam follower is extending horizontally from an outer circumferential surface of the mounting table so as to be in contact with the first cam follower. Also, a resilient member connecting the mounting table and the moving body brings the first cam follower and the second cam follower into elastic contact with each other.