Wafer Placement Table Gas Plug Structure to Reduce Discharge

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Solution Overview

Problem

Discharge occurs around the base plate-side end of the electrically insulating gas passage plug in existing wafer placement tables, despite the presence of an electrically insulating second porous portion.

Innovation Solution

A wafer placement table design that includes a ceramic plate with an electrically conductive plate, a ceramic plate penetrating part, an electrically insulating gas passage plug, and an electrically conductive gas passage part with a plate spring that presses the gas passage plug upward with elastic force, maintaining electrical continuity and reducing potential differences.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If an electrically insulating gas passage plug is used to ensure gas flow, then gas flow rate is maintained, but discharge occurs around the base plate-side end of the plug

Engineering Contradiction:

Improvegas flow rateVSAvoiddischarge

Core Design Contradiction:

Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

An electrically conductive member is introduced as an intermediary between the electrically insulating gas passage plug and the electrically conductive base plate. This intermediary member provides a gradual transition in electrical conductivity, preventing sudden potential differences that cause discharge while maintaining gas flow through the plug.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The electrical conductivity parameter is changed gradually from the insulating plug to the conductive base plate through the intermediate conductive member. This gradual parameter transition eliminates abrupt electrical property changes at the interface, thereby suppressing discharge occurrence.

Inventive Principle:

Principle #35Parameter changes

2Quantity of substance

If an electrically insulating porous member is placed on the bottom surface of the gas passage plug, then gas flow is ensured, but potential difference occurs around the plate-side end

Engineering Contradiction:

Improvegas flowVSAvoidelectrical continuity

Core Design Contradiction:

Quantity of substanceVSReliability

Solution Approach 1:

A composite structure is created by combining the electrically insulating gas passage plug with an electrically conductive member at its base. This composite configuration allows the plug to maintain gas flow insulation properties while the conductive member ensures electrical continuity with the base plate, eliminating potential differences.

Inventive Principle:

Principle #40Composite materials

3Object-affected harmful factors

If electrical continuity is maintained with a conductive member, then discharge is reduced, but the contact may become unstable

Engineering Contradiction:

Improvedischarge reductionVSAvoidcontact stability

Core Design Contradiction:

Object-affected harmful factorsVSStability of the object's composition

Solution Approach 1:

The contact between the electrically conductive member and the base plate is designed to be dynamically adaptable rather than rigid. The conductive member can adjust its position and contact pressure to maintain stable electrical continuity despite thermal expansion, vibration, or assembly variations, ensuring reliable discharge prevention.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively reduces discharge around the electrically conductive plate-side end of the gas passage plug by ensuring electrical continuity and stable gas flow, enhancing the reliability of the wafer processing environment.

Implementation Method 1

the electrically conductive gas passage part has a plate spring that presses the electrically insulating gas passage plug upward with elastic force

Methodology Applied

Scientific EffectElastic force: Elasticity

Data Source

PatentUS20250299935A1Wafer placement table

Publication Date: 2025.09.25 NGK INSULATORS LTD

AI summary

A wafer placement table includes a ceramic plate; an electrically conductive plate joined to a bottom surface of the ceramic plate; a ceramic plate penetrating part extending through the ceramic plate; an electrically insulating gas passage plug provided at the ceramic plate penetrating part; a gas introduction passage provided at least inside the electrically conductive plate; and an electrically conductive gas passage part provided in the gas introduction passage, the electrically conductive gas passage part being in contact with a bottom surface of the electrically insulating gas passage plug, the electrically conductive gas passage part being electrically continuous with the electrically conductive plate, the electrically conductive gas passage part allowing gas to pass between the electrically insulating gas passage plug and the gas introduction passage, wherein the electrically conductive gas passage part has a plate spring that presses the electrically insulating gas passage plug upward with elastic force.