Wafer Placement Table Mounting with a Ductile Threaded Insert
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Solution Overview
Problem
The existing wafer placement tables with brittle cooling bases, such as metal matrix composite materials, face issues with structural integrity when a female thread hole is used, as the force applied during tightening can cause the cooling base to break.
Innovation Solution
A wafer placement table design that incorporates a ductile connection member stored in a storage hole on the cooling base, which is restricted from axial rotation and engages with an engagement section, allowing for secure screwing without risking the brittle cooling base.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a female thread hole is provided in the cooling base for screwing, then the wafer placement table can be tightened to the installation plate, but the brittle cooling base may break due to local pulling force
Solution Approach 1:
The connection function is segmented into two parts: the brittle cooling base provides positioning and support through the storage hole, while the ductile connection member provides the load-bearing threading function. This segmentation allows each component to be optimized for its specific function without compromise.
Solution Approach 2:
The ductile connection member acts as an intermediary between the brittle cooling base and the installation plate. It absorbs the mechanical stress and pulling forces that would otherwise be transmitted to and potentially break the brittle cooling base.
2Ease of manufacture
If a female thread hole is provided in the cooling base, then threading connection is enabled, but axial rotation of the connection member cannot be restricted
Solution Approach 1:
The storage hole has different local qualities along its length: the upper portion provides rotational restriction through engagement sections, while the lower portion allows axial movement. This local differentiation enables both rotational stability and axial flexibility.
Solution Approach 2:
The connection member has dynamic freedom to move axially within the storage hole while being constrained rotationally. This dynamic capability allows the connection to adapt during installation and operation, enabling easy threading while maintaining stability.
3Reliability
If the connection member is stored in the storage hole, then axial rotation is restricted and engagement is enabled, but the structure becomes more complex
Solution Approach 1:
The storage hole serves multiple functions: it positions the connection member, restricts axial rotation through engagement sections, and allows axial movement. This multi-functionality reduces the need for separate components and minimizes overall structural complexity.
Solution Approach 2:
The storage hole combines positioning, rotational constraint, and axial flexibility functions into a single integrated feature. The engagement sections are merged with the hole structure itself rather than being separate components, simplifying the overall design.
Data Source
AI summary
A wafer placement table includes an alumina base that has a wafer placement surface on its upper surface, and incorporates an electrode; a brittle cooling base bonded to a lower surface of the alumina base; and a ductile connection member stored in a storage hole, opened in a lower surface of the cooling base, in a state of restricted axial rotation and in a state of engaging with an engagement section of the storage hole, the ductile connection member having a male thread section or a female thread section.