Rotatable Wafer Table Utility Supply Without Line Breakage

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Solution Overview

Problem

Existing wafer processing apparatuses face challenges in efficiently providing utilities such as fluids or electricity to a rotatable table without risking breakage of the supply lines during rotary movement.

Innovation Solution

A wafer processing apparatus with a rotatable table that includes a drive assembly capable of creating rotary movement in both clockwise and anticlockwise directions, along with a supply line that is either flexible or curled to accommodate rotation, thereby preventing breakage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a supply line is provided to the rotatable table to supply utilities, then the operational capability of the apparatus is improved, but the supply line may break during rotary movement

Engineering Contradiction:

Improveutility supply reliabilityVSAvoidsupply line strength

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The supply line is configured as a flexible structure that can bend and deform to accommodate the rotary movement of the table. This flexibility allows the supply line to follow the rotational motion without breaking, resolving the contradiction between maintaining utility supply reliability and preventing supply line breakage during rotation.

Inventive Principle:

Principle #30Flexible shells and thin films

2Device complexity

If the drive assembly rotates the table in a single direction, then the structure is simpler, but the supply line may break due to continuous rotation in one direction

Engineering Contradiction:

Improvedrive assembly complexityVSAvoidsupply line reliability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The drive assembly is configured to rotate the table in periodic bidirectional movements (clockwise and anticlockwise directions). This periodic reversal of rotation direction prevents the supply line from experiencing continuous unidirectional stress that would lead to breakage, while maintaining relatively simple drive assembly structure.

Inventive Principle:

Principle #19Periodic action

3Strength

If the supply line is made rigid to prevent breakage, then the supply line strength is improved, but the rotatable table cannot perform rotary movement

Engineering Contradiction:

Improvesupply line strengthVSAvoidtable rotational adaptability

Core Design Contradiction:

StrengthVSAdaptability or versatility

Solution Approach 1:

The supply line is designed with dynamic flexibility, allowing it to adapt its configuration during rotary movement. This dynamic adaptability enables the supply line to maintain sufficient strength while accommodating the rotational motion of the table, resolving the contradiction between strength and rotational adaptability.

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS12288710B2Wafer processing apparatus with a rotatable table

Publication Date: 2025.04.29 ASM IP HLDG BV

AI summary

The disclosure relates to a wafer processing apparatus for processing wafers with a rotatable table provided with a support constructed and arranged to support a removable holder for storing a plurality of wafers. A drive assembly may be provided to provide a rotary movement to the rotatable table around a vertical axis perpendicular to the table; and, a supply line may be constructed and arranged to supply utilities to the rotatable table. The drive assembly may be controlled and configured to create the rotary movement of the table in a clockwise and/or an anticlockwise direction to avoid breakage of the supply line.