Wafer Movement Tracking Graphs for Parser-Free Log Analysis
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Solution Overview
Problem
The pre-processing of machine log files for semiconductor manufacturing processes is time-consuming and varies significantly across machines, hindering efficient optimization of manufacturing processes due to the need for Parser program development, which prolongs project timelines.
Innovation Solution
An analysis method and device utilizing graphics processing technology to analyze semiconductor manufacturing processes without requiring Parser programs, enabling automatic loading and processing of machine log files through a graphics interface, generating wafer movement tracking graphs to identify bottlenecks and optimize processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If Parser program development is used to process machine log files, then data processing accuracy is improved, but project timeline is extended by 2 to 3 months
Solution Approach 1:
The patent creates a visual copy of the manufacturing process through wafer movement tracking graphs that replicate the actual process flow, machine actions, and timing information. This visual representation serves as an alternative to traditional Parser programs, enabling analysts to understand and optimize processes without extensive programming development
Solution Approach 2:
The patent replaces the mechanical system of Parser program development with a graphical user interface-based system. Instead of requiring programmers to write and debug code, the system uses visual drag-and-drop operations and automatic graph generation to achieve the same data processing and analysis goals
2Productivity
If custom Parser programs are developed for each machine, then data processing capability is improved, but device complexity increases
Solution Approach 1:
The patent creates a universal system that can process log files from multiple different machine types through a single graphical interface. The wafer movement tracking graph technology serves multiple functions: visualizing process flow, identifying bottlenecks, analyzing timing, and generating optimization insights, eliminating the need for separate Parser programs for each machine type
Solution Approach 2:
The system performs automatic processing of machine log files through the graphical interface, eliminating the need for manual Parser program development. The automatic generation of wafer movement tracking graphs from raw log data represents a self-service capability that reduces both time and complexity requirements
3Measurement precision
If detailed pre-processing treatment is applied to machine log files, then analysis accuracy is improved, but work amount increases to 70 to 80% of total project
Solution Approach 1:
The patent performs preliminary organization of log file data into structured formats that automatically generate wafer movement tracking graphs. By pre-structuring the data in a standardized format during the loading phase, the system eliminates the need for extensive pre-processing treatment later, reducing the 70-80% work burden while maintaining analysis accuracy
Data Source
AI summary
An analysis method and an analysis device for a semiconductor manufacturing process are provided. The analysis method of the semiconductor manufacturing process includes the following steps. A semiconductor machine log file is loaded. A plurality of machine action events are defined from the semiconductor manufacturing machine log file. A wafer moving path map is generated according to a wafer moving information file. A plurality of account point information are bound to each of the machine action events according to the wafer moving path map. A wafer movement tracking graph is generated according to the machine action events that have been bound to account information.