Wafer Transfer End Effector Synchronous Blade Actuation
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Solution Overview
Problem
Current semiconductor wafer transfer systems face challenges in ensuring proper wafer alignment and preventing slippage during transfer, which affects throughput due to the need for frequent readjustment of wafers on support surfaces.
Innovation Solution
An end effector with laterally movable blades and an actuator system that synchronously moves the blades to securely hold and release wafers, utilizing a longitudinally movable piston and pivotally coupled links to maintain wafer alignment and prevent misplacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional wafer transfer systems are used, then wafer transfer can be performed, but wafer alignment precision deteriorates due to slippage and shifting during transfer
Solution Approach 1:
The end effector is segmented into multiple independent blades (first blade, second blade, third blade) that can move laterally independently or synchronously. Each blade can be positioned and adjusted separately to optimally contact and hold the wafer, preventing slippage while maintaining alignment precision during transfer operations.
Solution Approach 2:
The blade mounts are designed to be laterally movable on linear rails, transforming static blade positions into dynamic, adjustable positions. This allows the blades to adapt their positions to accommodate wafer placement variations and maintain precise alignment throughout the transfer process, resolving the contradiction between holding stability and alignment precision.
2Productivity
If wafer transfer speed is increased, then throughput improves, but wafer placement accuracy deteriorates due to increased risk of slippage and misalignment
Solution Approach 1:
The end effector performs preliminary positioning actions by using multiple blades to contact and secure the wafer before the main transfer motion begins. The synchronous lateral movement of blades prepares the wafer holding configuration in advance, ensuring that even at high transfer speeds, the wafer remains securely positioned and accurately aligned throughout the transfer process.
3Reliability
If single blade design is used, then device complexity is reduced, but wafer holding reliability deteriorates due to increased slippage risk
Solution Approach 1:
Multiple blade assemblies are merged into a single integrated end effector unit with synchronized actuation. The first, second, and third blades work together as a coordinated system, combining their holding forces to reliably secure the wafer. This merging approach maintains high holding reliability while consolidating the structure into one manageable device rather than separate components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures precise alignment and secure holding of wafers during transfer, reducing the need for readjustment and enhancing wafer processing throughput by minimizing misalignment and slippage.
Implementation Method 1
The first actuator link is pivotally coupled to the longitudinally movable piston at a first end thereof by a first link pivot and the first actuator link is pivotally coupled to the first blade mount at a second end thereof by a first mount pivot
Implementation Method 2
The first blade mount is laterally movable on the at least one first mount linear rail and the second blade mount is laterally movable on the at least one second mount linear rail
Data Source
AI summary
An end effector of a wafer transfer system includes synchronously movable blades operable to hold and release wafers. The end effector comprises an end effector housing including a first blade mount coupled to a first blade, a second blade mount coupled to a second blade, and an actuator operable to move the blade mounts on respective linear rails. The actuator includes a longitudinally movable piston coupled to the respective blade mounts by respective actuator links. The actuator links are pivotally coupled to the longitudinally movable piston at respective first ends thereof and to the first and second blade mounts at respective second ends thereof wherein moving the piston towards a retracted position causes the blades to synchronously move laterally towards each other and moving the piston towards the retracted position causes the blades to synchronously move laterally away from each other so as to hold or release a wafer.