Wafer Transfer Position Correction Using Image Feedback
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Solution Overview
Problem
Conventional vertical thermal processing apparatuses face challenges in accurately conveying wafers due to misalignment issues, which can affect the quality of thermal processing.
Innovation Solution
An information processing apparatus and method that utilizes image processing and autonomous control to correct the position of a conveying apparatus, using cameras to capture images of wafer movement operations and calculate corrected teaching data for precise alignment of wafers during transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional conveying apparatus is used for wafer transfer, then the structure is simple and operation is straightforward, but misalignment occurs during wafer placement affecting thermal processing quality
Solution Approach 1:
The system captures images of the wafer placement position using an imaging apparatus, performs image processing to quantify the relationship between container position and wafer position, and uses this feedback to determine correction data that adjusts the conveying apparatus teaching data, creating a closed-loop control system that improves placement precision
Solution Approach 2:
The patent replaces purely mechanical positioning with a hybrid system that uses optical imaging and computational image processing to detect and correct placement deviations, substituting mechanical precision requirements with optical-mechanical integration
2Extent of automation
If teaching data is used for autonomous control, then automation level increases, but misalignment errors accumulate affecting transfer accuracy
Solution Approach 1:
The system uses image processing feedback to correct teaching data by determining the quantified relationship between container position and wafer placement position, preventing error accumulation in autonomous operations by continuously adjusting teaching data based on actual placement deviations
Solution Approach 2:
The conveying apparatus performs self-correction by using its own imaging apparatus to detect placement deviations and automatically adjusting its teaching data without external intervention, enabling autonomous improvement of transfer accuracy
Data Source
AI summary
An information processing apparatus for controlling a conveying apparatus to convey a substrate to be processed by a substrate processing apparatus includes a processor that performs operations including controlling the conveying apparatus, according to teaching data, to perform a first movement operation including putting the substrate into a container configured to carry the substrate and a second movement operation including getting the substrate from the container, acquiring image data including an image of a placement position for the substrate in the container during the first movement operation and the second movement operation, performing image processing on the image data to quantify a relationship between a position of the container and a position of the substrate, determining the quantified relationship to yield a determination result, and outputting correction data for correcting the conveying apparatus with respect to the first movement operation and the second movement operation, based on the determination result.