Bi-directional Wafer Transfer Mechanism for Incompatible Cassettes

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Current semiconductor wafer processing systems require two separate wafer transfer machines to transfer wafers between cassettes with incompatible registration features, leading to increased costs, inconvenience, and space requirements, as well as limited efficiency due to the need for manual or single-wafer robotic transfer.

Innovation Solution

A single wafer transfer machine with a support plate and carriage mechanism that includes adjustable registration features and push-pull rods allows for bidirectional transfer of wafers between cassettes with different registration features, enabling simultaneous transfer of an entire cassette load in a single pass.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If two separate wafer transfer machines are used to transfer wafers between cassettes with incompatible registration features, then the transfer operation can be accomplished, but the cost, space requirements, and operational convenience deteriorate

Engineering Contradiction:

Improvecompatibility with different cassette registration featuresVSAvoidnumber of transfer machines required

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The support plate is designed with multiple registration features that can accommodate different cassette types. The plate includes a first registration feature for standard cassettes and a second registration feature for high-temperature cassettes with different bottom registration features, allowing a single transfer machine to handle multiple cassette types

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The carriage mechanism can be dynamically repositioned along the track to accommodate bidirectional transfer operations. The carriage moves along a track mechanism to position pushing members at different locations, enabling flexible transfer between cassettes with different registration features without requiring separate fixed machines

Inventive Principle:

Principle #15Dynamics

2Productivity

If two separate wafer transfer machines are used, then transfer between incompatible cassettes is possible, but the operational speed and efficiency deteriorate due to manual or single-wafer robotic transfer

Engineering Contradiction:

Improvewafer transfer speedVSAvoidoperational complexity

Core Design Contradiction:

ProductivityVSEase of operation

Solution Approach 1:

The transfer mechanism uses multiple pushing members (first and second pushing members) that can simultaneously push multiple wafers from one cassette to another. This segmented approach allows parallel transfer of multiple wafers, significantly increasing transfer speed compared to single-wafer robotic systems

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The mechanism combines multiple pushing members and registration features into a single integrated transfer machine. This merging of functions allows simultaneous multi-wafer transfer operations while maintaining ease of operation through a unified device rather than multiple separate machines

Inventive Principle:

Principle #5Merging (Combining)

3Device complexity

If a single transfer machine with bidirectional capability is used, then cost and space are reduced, but the mechanism complexity increases

Engineering Contradiction:

Improvenumber of machinesVSAvoidbidirectional transfer capability

Core Design Contradiction:

Device complexityVSAdaptability or versatility

Solution Approach 1:

The support plate features asymmetric registration configurations with a first registration feature for standard cassettes and a second registration feature for high-temperature cassettes. This asymmetric design allows the single machine to accommodate different cassette types with incompatible registration features through non-uniform positioning structures

Inventive Principle:

Principle #4Asymmetry

Data Source

PatentUS7771157B2Bi-directional wafer transfer mechanism and method

Publication Date: 2010.08.10 TEXAS INSTRUMENTS INC

AI summary

A wafer transfer machine transfers wafers from either of a first wafer cassette (55) and a second wafer cassette (56) having incompatible registration features into the other, and includes a support plate (30) having a top surface (38) for supporting the first and second wafer cassette. A first and second registration bosses attached to the top surface extend upward into registration features of the first and second wafer cassette, respectively. A carriage (1) is supported by and movable in opposite directions along a track mechanism (41A,B) that is attached in fixed relationship to the support plate (30). First and second wafer pushing members (10A,B) are supported by the carriage. Each wafer pushing member can be moved to push wafers in one of the wafer cassettes into the other by moving the carriage in one direction or the other.