Wafer Transfer Path Planning for Interference-Free Magnetic Movers
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The high degree of freedom in movement of transfer bodies in a substrate transfer apparatus leads to an increased burden for operators when setting moving paths to prevent interference, which is crucial for efficient wafer transfer in a semiconductor manufacturing process.
Innovation Solution
A path setting system that includes a virtual area setting part, a path generating part, and an interference determining part to simulate and determine optimal moving paths for transfer bodies, adjusting paths or speeds to avoid interference while minimizing transfer time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If transfer bodies are allowed to move with high degree of freedom in the substrate transfer apparatus, then transfer efficiency and flexibility are improved, but operator burden for setting paths and preventing interference increases
Solution Approach 1:
The system enables automatic path setting where the control device autonomously determines optimal moving paths for multiple transfer bodies based on their current positions and destinations, eliminating the need for manual operator intervention while maintaining high transfer efficiency
Solution Approach 2:
The patent replaces manual operator control with an automated control device that uses computational algorithms to determine transfer paths, substituting human decision-making with automated systems that can process multiple variables simultaneously
2Speed
If multiple transfer bodies move simultaneously with high freedom, then transfer speed is improved, but interference between transfer bodies increases
Solution Approach 1:
The control device continuously monitors the positions of all transfer bodies and dynamically adjusts their moving paths based on real-time feedback, preventing interference while maintaining high transfer speeds through coordinated control
Solution Approach 2:
The system performs preliminary path planning that anticipates potential interference between transfer bodies before it occurs, pre-calculating safe trajectories that maintain optimal transfer speed while avoiding collisions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces operator burden by automating the path setting process, ensuring efficient and interference-free movement of transfer bodies in the substrate transfer apparatus, thereby enhancing the efficiency of wafer transfer operations.
Implementation Method 1
each having a support configured to support a substrate and configured to float and move by a magnetic force from a floor forming the substrate transfer area
Data Source
AI summary
A path setting system is used for setting paths of a plurality of transfer bodies in a substrate transfer device, the substrate transfer device including a substrate transfer area and the plurality of transfer bodies, each having a support configured to support a substrate and configured to float and move by a magnetic force from a floor forming the substrate transfer area. The path setting system includes a virtual area setting part configured to set a virtual area corresponding to the substrate transfer area, a path generating part configured to generate, in the virtual area, moving paths of the transfer bodies from a movement start position to a movement end position, and an interference determining part configured to determine interference between the moving paths.