Wafer Transfer Robot With Two-Way Sliding and Elevation
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Solution Overview
Problem
Current semiconductor manufacturing processes require efficient transfer and storage of wafers, but existing temporary storage facilities are limited in capacity and space, necessitating a more integrated and capable robot for handling and transferring wafers within these facilities.
Innovation Solution
A robot designed to move along a moving rail, featuring a two-way sliding unit and elevation-driving mechanism, allowing it to slide and elevate wafers in both directions, enabling efficient transfer and storage of wafers within an integrated storage system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a temporary storage facility is installed around a moving path of a robot transferring the wafer, then the storage capacity is improved, but the storage facility can only store a small quantity of wafer for a while
Solution Approach 1:
The patent introduces vertical movement capability to the robot, allowing it to operate across multiple levels (upward and downward movements). This dimensional expansion enables the robot to access storage facilities positioned at different heights, significantly increasing storage capacity without occupying additional horizontal floor space, thereby resolving the contradiction between storage capacity and transfer efficiency
Solution Approach 2:
The robot is equipped with both horizontal moving rails and vertical moving rails, creating a dynamic positioning system that can adapt to different storage locations. This dynamic capability allows the robot to efficiently navigate to any storage position in the multi-level facility, maintaining high transfer efficiency while accommodating large quantities of wafers across multiple levels
2Quantity of substance
If the storage facility is installed on the ground of the semiconductor factory, then the storage capacity is improved, but it takes up a large space
Solution Approach 1:
The invention transitions from ground-level horizontal storage to multi-level vertical storage by installing storage facilities at different heights and equipping the robot with vertical movement capability. This utilizes the vertical dimension to expand storage capacity while minimizing the horizontal floor space occupied by the storage facility
Solution Approach 2:
The robot system nests multiple movement capabilities within a single integrated platform - the horizontal moving rail for lateral movement and the vertical moving rail for elevation, allowing the robot to access storage positions in three-dimensional space without requiring proportional increases in floor space
3Quantity of substance
If an integrated facility for storing and handling a large amount of wafers is considered, then the storage capacity is improved, but a more capable robot is required
Solution Approach 1:
The robot system is segmented into distinct functional components: a horizontal moving rail for lateral transportation, a vertical moving rail for elevation, and a holding unit for wafer storage. This segmentation allows each component to perform its specific function efficiently, managing overall system complexity while enabling the integrated facility to handle large amounts of wafers
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The robot effectively transfers and stores wafers across multiple layers, enhancing storage capacity and efficiency within semiconductor manufacturing facilities by enabling sliding and elevation capabilities, thus addressing the limitations of existing temporary storage solutions.
Implementation Method 1
an elevating belt configured to enclose the pair of elevating pulleys and be connected to the elevating block
Implementation Method 2
the elevating block connects the elevation-moving member and the slide base through the guide slot
Implementation Method 3
a two-way sliding unit configured to be connected to the holding unit and slide the holding unit to both sides of the body
Data Source
AI summary
Disclosed herein is a robot for transferring an article: a body configured to be moved while hanging on a moving rail; a holding unit configured to hold the article; a two-way sliding unit configured to be connected to the holding unit and slide the holding unit to both sides of the body; and an elevation-driving unit configured to be installed at the body and connected to the two-way sliding unit to elevate the two-way sliding unit along a height direction of the body.