Wall-Mounted Distribution Storage System for Semiconductor Fab Space Optimization
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Solution Overview
Problem
Semiconductor production sites face challenges in minimizing the space occupied by distribution storage systems while efficiently storing carriers, such as substrates, within fabrication facilities.
Innovation Solution
A distribution storage system design that utilizes idle space around a wall by incorporating a wall protruding from the floor, shelves adjacent to the wall, a crane and transfer robot system, and an overhead hoist transfer device, allowing carriers to be stored in a single plane without protruding beyond the sides of columns, thereby optimizing space usage and allowing existing infrastructure to remain intact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the distribution storage system is designed to store carriers efficiently, then the storage capacity is improved, but the space occupied in the fabrication facility increases
Solution Approach 1:
The patent transitions from traditional floor-based storage to wall-mounted vertical storage, utilizing the vertical dimension and wall surface area to store carriers. This dimensional change allows the system to achieve high storage capacity while occupying minimal floor space in the fabrication facility.
Solution Approach 2:
The storage system employs a nested structure where multiple shelves are arranged vertically along the wall, with each shelf capable of holding carriers. The compact nested arrangement maximizes the use of vertical space while maintaining efficient carrier storage capacity.
2Area of stationary object
If the storage system is positioned to minimize floor space usage, then the area occupied is reduced, but the complexity of the support structure increases
Solution Approach 1:
The patent extracts the storage system from the floor plane and relocates it to the wall surface, removing the need for extensive floor-based support structures. This extraction reduces floor space occupation while the wall-mounted configuration simplifies the overall support structure by utilizing the wall as the primary load-bearing element.
3Quantity of substance
If the shelves are arranged in multiple planes to increase storage capacity, then the quantity of carriers stored is improved, but the space protruding into the fabrication facility increases
Solution Approach 1:
Instead of arranging shelves in multiple horizontal planes that would protrude into the facility, the patent utilizes the vertical dimension by stacking shelves along the wall surface. This vertical arrangement maximizes storage capacity while keeping the horizontal footprint minimal and not protruding into the fabrication facility space.
Data Source
AI summary
A distribution storage system including a wall protruding from a floor in a vertical direction and extending in a first horizontal direction, a plurality of shelves positioned adjacent to a side of the wall and having a space in which carriers are accommodated, an interface port positioned adjacent to a lowermost shelf among the plurality of shelves, a first rail positioned near a ceiling to face the interface port in the vertical direction and extending in the first horizontal direction, a crane moving along the first rail, and a transfer robot coupled to the crane, driven in the vertical direction, and gripping and releasing the carriers, wherein the plurality of shelves are all arranged on one plane.