Waste Fluid Segregation Control for Semiconductor Drain Routing
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Solution Overview
Problem
Existing semiconductor manufacturing processes face challenges in efficiently and cost-effectively handling waste fluids, particularly those containing hazardous materials, due to the need for expensive treatment and disposal methods.
Innovation Solution
A system and method for waste fluid collection that segregates waste streams based on fluid characteristics using a controller and valves to direct waste fluids to appropriate drains, enabling cost-effective treatment and disposal by characterizing and directing waste fluids to specific drains configured for different types of waste.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If waste fluids are treated together to remove hazardous waste, then environmental compliance is ensured, but treatment cost increases
Solution Approach 1:
The waste collection system divides the waste stream into multiple segregated pathways based on fluid characteristics. Different facility drains are connected through valves that route specific waste types to appropriate treatment systems, allowing targeted treatment rather than mixing all wastes together. This segmentation enables cost-effective treatment by directing only hazardous wastes to expensive treatment facilities while routing non-hazardous wastes to simpler disposal paths.
2Loss of energy
If waste fluids are segregated by characteristics, then treatment cost is reduced, but system complexity increases
Solution Approach 1:
A controller acts as an intermediary between the waste generation source and multiple facility drains. The controller receives information about waste fluid characteristics and automatically actuates appropriate valves to route wastes to suitable drains. This intermediary intelligence manages the system complexity by centralizing the decision-making logic, making the segmented waste routing system easier to operate and maintain despite having multiple pathways.
3Productivity
If multiple facility drains are used for different waste types, then treatment efficiency is improved, but ease of operation decreases
Solution Approach 1:
The waste collection system operates autonomously by automatically routing waste fluids to appropriate facility drains based on characterized fluid properties. The controller monitors waste characteristics and actuates valves without requiring manual intervention or operator judgment. This self-service capability maintains high treatment efficiency through proper waste segregation while eliminating operational complexity for users.
Data Source
AI summary
The present disclosure generally relates to methods and system used to collect waste fluids. A system controller is disclosed to control the operation of at least a portion of the system. The controller has a CPU. The fabrication facility includes a first processing system having fluid dispensed therein for processing a material on a part. A first drain is configured to collect the processing fluid as waste fluid after processing the part. The fabrication facility also includes a waste collection system fluidly coupled to the system drain. The waste collection system has two or more valves configured to couple the system drain and two or more facility drains. Each facility drain is uniquely coupled to one of the two or more valves. The CPU is configured to operate the valves between an open and a closed state in response to the fluid entering the system drain.