Waste Gas Scrubber Catalyst Cleaning with Compressed-Air Pulses
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Solution Overview
Problem
Existing waste gas scrubbers face issues with fine powder accumulation on catalyst surfaces, leading to reduced reactivity and plugging, and inefficiencies in decomposing organic compounds, particularly in semiconductor manufacturing processes.
Innovation Solution
A waste gas scrubber system with a catalyst support structure and air pulse separation device that uses compressed air to remove fine powders from the catalyst surface, combined with a wet processing system to enhance decomposition efficiency and prevent plugging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a catalyst is used to perform oxidation processing on organic compounds in waste gas, then decomposition efficiency is improved, but fine powders accumulate on the catalyst surface causing reduced reactivity and plugging
Solution Approach 1:
The patent implements periodic action by introducing compressed air pulses at predetermined intervals to the reaction chamber. These periodic air pulses create pressure waves that periodically impact the catalyst surface, effectively removing accumulated fine powders and preventing catalyst plugging while maintaining continuous decomposition operation
Solution Approach 2:
The patent applies pneumatics by using compressed air as a fluid medium to remove fine powders from the catalyst surface. The compressed air is introduced through nozzles positioned to direct pressure waves toward the catalyst, utilizing gas pressure and fluid dynamics to detach and carry away accumulated particles without mechanical contact
2Reliability
If compressed air is introduced to remove fine powders from the catalyst surface, then catalyst reactivity is maintained, but energy consumption increases
Solution Approach 1:
The patent reduces energy consumption by using periodic rather than continuous compressed air introduction. The air pulses are applied at predetermined intervals based on the accumulation rate of fine powders, ensuring catalyst surface cleanliness is maintained while minimizing the total energy input required for powder removal
Solution Approach 2:
The patent optimizes energy usage by controlling parameters of the compressed air introduction, including pulse timing, air pressure levels, and introduction duration. These parameter adjustments allow effective fine powder removal while minimizing the energy consumed by the compressed air system
3Productivity
If high temperature processing is used to decompose waste gas, then decomposition efficiency is improved, but energy consumption increases and greenhouse gases are not effectively removed
Solution Approach 1:
The patent changes the temperature parameter by performing oxidation processing at relatively low temperatures (below 1000°C) rather than high temperatures. This is achieved by using catalysts that facilitate oxidation reactions at lower temperature ranges, thereby reducing energy consumption while maintaining effective decomposition of organic compounds including greenhouse gases
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively removes fine powders from the catalyst surface, maintaining reactivity and improving decomposition efficiency while minimizing energy consumption and environmental impact.
Implementation Method 1
at least one catalyst material configured to cause a chemical reaction with the heated waste gas
Implementation Method 2
performs an oxidation processing on an organic compound included in a waste gas
Implementation Method 3
at least one heater configured to heat the waste gas flowing into the reaction chamber
Implementation Method 4
a fine powder separation device configured to emit compressed air
Data Source
AI summary
A waste gas scrubber includes a reaction chamber configured to decompose waste gas, at least one heater configured to heat the waste gas flowing into the reaction chamber, a fine powder separation device configured to emit compressed air, and a monolith catalyst including a catalyst support, a plurality of catalyst inner cells, and at least one catalyst material, the catalyst support in the reaction chamber and configured to support the plurality of catalyst inner cells, and the at least one catalyst material configured to cause a chemical reaction with the heated waste gas, the catalyst support including a first surface at which a first end of each of the plurality of catalyst inner cells is exposed, and a second surface at which a second end of each of the plurality of catalyst inner cells is exposed.