Water-Soluble Pellicle Adhesive for Photomask Cleaning
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Solution Overview
Problem
The existing methods for removing pellicle adhesive residue from photomasks using acids like sulfuric acid or hydrogen peroxide can damage the photomask and cause haze defects, making it difficult to replace and clean the pellicle without damaging the optical pattern regions.
Innovation Solution
A water-soluble acrylic adhesive is used for the pellicle, which can be easily removed using water-based cleaning processes such as spin spraying, scrubbing, or sonic cleaning, eliminating the need for acidic solvents and preventing damage to the photomask.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If acid or hydrogen peroxide is used to remove pellicle adhesive residue, then the adhesive residue can be removed, but the photomask is damaged and haze defects occur
Solution Approach 1:
The adhesive composition is changed from acid-based to water-based, fundamentally altering the chemical parameters of the removal agent. This allows adhesive residue removal without the harmful effects of acids and hydrogen peroxide on the photomask
Solution Approach 2:
The pellicle is designed as a consumable component with a water-soluble adhesive that can be easily removed and replaced. The adhesive is intended to be used temporarily and then discarded through simple water washing, eliminating the need for durable, hard-to-remove adhesives
2Adaptability or versatility
If a consumable pellicle is used that requires physical detachment, then the pellicle can be replaced, but pellicle adhesive residue remains on the photomask
Solution Approach 1:
The adhesive's solubility parameter is changed to be water-soluble, transforming it from a permanent residue into a removable substance. This allows the adhesive to fulfill its bonding function during use, then easily dissolve and wash away with water, eliminating residue problems
Solution Approach 2:
The harmful adhesive residue is extracted from the system by making it water-soluble. The adhesive can be completely removed from the photomask surface through water washing, leaving no harmful substances behind
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of a water-soluble pellicle adhesive allows for safe and effective removal of adhesive residue without causing haze defects on the photomask, increasing productivity and extending the photomask's lifetime by avoiding chemical attacks.
Implementation Method 1
The pellicle adhesive may include a water-soluble acrylic adhesive material
Implementation Method 2
The water-soluble acrylic adhesive material may include at least one of a copolymer of an acrylate monomer and an acrylic acid monomer and a copolymer of an acrylate monomer and an amide monomer
Implementation Method 3
The COOK group, the COONa group, the COOCa group, and the COONHR3 group of the acrylic acid monomer may be formed by substituting a hydrogen ion in a COOH group of the acrylic acid monomer with a potassium ion (K+), a sodium ion (Na+), a calcium ion (Ca+) or an ammonium ion (NHR3+)
Implementation Method 4
the pellicle adhesive may include a water-soluble acrylic adhesive material... using water-based cleaning processes such as spin spraying
Implementation Method 5
using water-based cleaning processes such as spin spraying, scrubbing, or sonic cleaning
Data Source
AI summary
A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.