Water Treating Device Phosphorus Removal Microbial Control
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Solution Overview
Problem
Conventional wet cleaning devices in semiconductor manufacturing facilities face challenges with microbial layer formation in the water treatment process, leading to reduced efficiency in removing water-soluble contaminants and potential contamination due to microbial growth and chemical disinfectant by-products.
Innovation Solution
A water treating device equipped with a phosphorus removal system, including a phosphorus absorbent, ion exchange resin, electrodialysis device, or electrodeionization (EDI) device, which treats circulating water to prevent microbial growth by removing phosphorus, thereby preventing microbial layer formation and enhancing contaminant removal efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional water treatment methods are used in wet cleaning devices, then water-soluble contaminants can be removed, but microbial layer formation occurs reducing efficiency and causing contamination
Solution Approach 1:
The patent applies preliminary action by adding biocide to the circulating water before microbial contamination can occur. The biocide is continuously supplied to prevent microbial layer formation on the heat exchanger surface, addressing the root cause before it becomes a problem. This preventive approach maintains contaminant removal efficiency while preventing the reliability issue of microbial contamination.
Solution Approach 2:
The patent introduces biocide as an intermediary substance that mediates between the water treatment process and microbial contamination. The biocide acts as a chemical agent that selectively targets microorganisms without interfering with the heat transfer function or contaminant removal efficiency. This intermediary approach resolves the contradiction by adding a substance that specifically addresses microbial growth while maintaining other system functions.
2Reliability
If chemical disinfectants are used to control microbial growth, then microbial layer formation is reduced, but chemical disinfectant by-products cause potential contamination
Solution Approach 1:
The patent applies parameter changes by carefully controlling the dosage and concentration of biocide in the circulating water system. By optimizing the biocide concentration to effective yet minimal levels, the system achieves reliable microbial growth control while minimizing the formation of chemical by-products. This parameter optimization resolves the contradiction between effective disinfection and by-product reduction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents microbial layer formation, reduces clogging and contamination risks, and improves the efficiency of water-soluble contaminant removal without altering the operating conditions of the wet cleaning device, thereby enhancing air quality and reducing costs associated with microbial layer removal.
Implementation Method 1
a phosphorus removing device configured to remove phosphorus contained in the circulating water
Implementation Method 2
a phosphorus removing device configured to remove phosphorus contained in the circulating water
Implementation Method 3
a phosphorus removing device configured to remove phosphorus contained in the circulating water
Implementation Method 4
a phosphorus removing device configured to remove phosphorus contained in the circulating water
Implementation Method 5
an ultraviolet ray irradiation device configured to irradiate an ultraviolet ray to the circulating water
Data Source
AI summary
Embodiments of the present inventive concept provides a water treating device for treating a circulating water including a storage tank configured to store the circulating water, a first filter configured to filter the circulating water discharged by the storage tank, a phosphorus removing device configured to remove phosphorus contained in the circulating water, and an ultraviolet ray irradiation device configured to irradiate an ultraviolet ray to the circulating water.