Waterproof Load Cell for Substrate Cleaning Roll Measurement

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Solution Overview

Problem

Current load measuring apparatuses in substrate cleaning systems face challenges in accurately measuring the load applied by roll cleaning tools during the cleaning process, as they often require calibration with a dummy roll and struggle to account for differences in deformation between the dummy roll and the actual cleaning tool, leading to inaccuracies in load measurement.

Innovation Solution

A waterproof load measuring apparatus with a load cell having a load measuring surface equal to the substrate diameter, supported by a base plate with arc-shaped cutouts, allows for direct measurement of the load applied by the roll cleaning tool while rotating and supplying cleaning liquid, enabling accurate load measurement by correlating pressure changes with applied loads and deformed amounts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a dummy roll is used for load measurement calibration, then the load cell can be protected from cleaning liquid infiltration, but the measurement accuracy deteriorates due to deformation differences between the dummy roll and actual cleaning tool

Engineering Contradiction:
Improveload cell protectionVSAvoidload measurement accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent uses a copy of the actual cleaning tool (the roll cleaning tool itself) for measurement instead of a dummy roll. The roll cleaning tool is pressed against the load cell while rotating, and its deformation is measured by a displacement sensor. This copying approach allows the measurement system to accurately reflect the actual cleaning process conditions, resolving the accuracy issue while maintaining protection through the waterproof load cell design.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The patent changes the measurement parameters by introducing rotation speed as a variable. The roll cleaning tool rotates during measurement, and the displacement sensor measures the deformation dynamically. This parameter change allows the system to account for the actual deformation characteristics of the cleaning tool during operation, improving measurement accuracy while the waterproof load cell maintains protection.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the load cell measuring surface length is made equal to the substrate diameter, then the measurement represents actual cleaning conditions accurately, but the device complexity increases

Engineering Contradiction:
Improveload measurement representativenessVSAvoidload cell structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The load cell with a measuring surface length equal to the substrate diameter serves multiple functions: it measures the load applied by the roll cleaning tool, accommodates the rotation of the cleaning tool, and provides a measurement surface that accurately represents the actual cleaning contact area. This universal design allows a single load cell configuration to handle all measurement requirements without increasing overall device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent replaces complex mechanical measurement systems with a simpler approach using a waterproof load cell and displacement sensor. Instead of using multiple sensors or complex mechanisms to measure load and deformation separately, the system uses the displacement sensor to measure the deformation of the rolling cleaning tool itself, which indirectly provides the load information through the waterproof load cell's measurement surface.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If the roll cleaning tool rotates during load measurement, then the measurement reflects actual cleaning conditions, but the difficulty of detecting and measuring increases

Engineering Contradiction:
Improvedynamic load measurement accuracyVSAvoiddeformation measurement difficulty
Core Design Contradiction:
Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent introduces a displacement sensor as an intermediary to measure the deformation of the rolling cleaning tool. The displacement sensor detects the change in position or deformation of the cleaning tool as it rotates and presses against the load cell. This intermediary measurement approach simplifies the detection of rotational deformation, allowing the system to accurately measure load during rotation without significantly increasing measurement difficulty.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables precise load measurement of roll cleaning tools under conditions similar to actual cleaning, reducing discrepancies between measured and applied loads, and allows for optimal load settings to be determined for subsequent cleaning processes.

Implementation Method 1

measuring a load applied from the roll cleaning tool while the roll cleaning tool is rotating and a cleaning liquid is supplied to the roll cleaning tool

Methodology Applied
Scientific EffectDeformation: Deformation

Data Source

PatentUS9719869B2Load measuring apparatus and load measuring method
Publication Date: 2017.08.01 EBARA CORP
  • US9719869B2 patent drawing
  • US9719869B2 patent drawing
  • US9719869B2 patent drawing

AI summary

A load measuring apparatus includes a waterproof load cell having a load measuring surface, of which the length is substantially equal to a diameter of the substrate, and a base plate that supports the waterproof load cell. The load measuring apparatus is set in a substrate cleaning apparatus like a substrate, and measures a load applied from the roll cleaning tool of the substrate cleaning apparatus using the waterproof load cell.