Wave-Layer Ion Source Target for Thermal and Erosion Control
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Solution Overview
Problem
Existing ion implantation targets have limited thermal characteristics and reaction surfaces, leading to increased cathode erosion rates and reduced ion source lifetime in semiconductor manufacturing.
Innovation Solution
A target body comprising a plurality of wave-shaped layers sandwiched between an upper and lower target body, with adjacent layers offset to form interstitial gas flow channels, enhancing thermal characteristics and reaction surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a traditional solid target is used in an ion source, then the structure is simple and easy to manufacture, but the thermal characteristics are limited and the reaction surface area is small, leading to increased cathode erosion rates
Solution Approach 1:
The target body is segmented into multiple wave-shaped layers stacked together, where each layer contributes to the overall reaction surface area. This segmentation increases the effective reaction surface without requiring a completely different target architecture, thereby improving ion source lifetime while maintaining manufacturing feasibility through modular assembly
Solution Approach 2:
The target structure transitions from a conventional flat or simple curved surface to a three-dimensional wave-shaped configuration with peaks and valleys. This dimensional transformation significantly increases the reaction surface area available for ion generation, improving thermal characteristics and reducing cathode erosion without proportionally increasing structural complexity
2Duration of action of moving object
If the target reaction surface area is increased to reduce cathode erosion, then ion source lifetime improves, but the target structure becomes more complex and difficult to manufacture
Solution Approach 1:
The target is divided into multiple identical or similar wave-shaped layers that can be manufactured separately and then stacked together. This segmentation allows each layer to be fabricated using standard processes, and the modular nature simplifies assembly and replacement, maintaining ease of manufacture while achieving increased total reaction surface area
Solution Approach 2:
The target employs a composite structure consisting of multiple wave-shaped layers that may be made from the same or different materials optimized for specific functions. This composite approach allows optimization of each layer's properties for thermal management and reaction efficiency while maintaining manufacturability through standardized layer fabrication
3Temperature
If wave-shaped layers are stacked to form interstitial gas flow channels, then thermal characteristics are enhanced and reaction area increases, but the target structure becomes more complex
Solution Approach 1:
The target layers feature wave-shaped curved surfaces with peaks and valleys rather than flat or simple geometric forms. This curvature creates natural interstitial channels between layers that facilitate gas flow and thermal management. The curved geometry enhances thermal characteristics by increasing surface area for heat dissipation while the repeating wave pattern maintains manufacturing simplicity
Solution Approach 2:
The stacked wave-shaped layers create a porous-like structure with interstitial channels formed between the layers. These channels allow gas flow through the target structure, enhancing thermal characteristics by improving heat removal and mass transport. The porous structure is achieved through the geometric arrangement of layers rather than requiring complex internal porosity, maintaining ease of manufacture
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved target body achieves enhanced thermal characteristics and a larger reaction area, reducing cathode erosion rates and increasing ion source lifetime, thereby improving beam current and reaction efficiency in ion implantation processes.
Implementation Method 1
Adjacent layers of the plurality of wave-shaped layers may be offset such that peaks of one layer interface with valleys of an adjoining layer, thereby forming a plurality of interstitial gas flow channels
Implementation Method 2
The target is used as a source of ions, which are created by energetic sputtering of the target
Implementation Method 3
A filament can be supported within the tubular body and emits electrons that heat the endcap through electron bombardment, thereby thermionically emitting ionizing electrons into the gas confinement chamber
Data Source
AI summary
A target body includes a plurality of wave-shaped layers sandwiched between an upper target body and a lower target body. Adjacent layers of the plurality of wave-shaped layers are offset such that peaks of one layer interface with valleys of an adjoining layer, thereby forming a plurality of interstitial gas flow channels. The target body defines a central bore along a central axis of the target body that extends between opposite planar ends of the target body, and the plurality of interstitial gas flow channels are open to the central bore.