Waveform Heating Resistor for Rapid Thermal Cycling in Furnaces

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Solution Overview

Problem

Conventional heat processing furnaces face issues with durability and cost due to thermal expansion and contraction of helical heating elements, leading to potential short-circuits and limited ability to quickly increase or decrease temperature, and existing solutions either compromise durability or are expensive.

Innovation Solution

A heat processing furnace design featuring a cylindrical heater with strip-shaped heating resistors bent into a waveform, pin members for radial movement, and a divided heat insulating member with groove sections and connecting plates to manage thermal expansion and facilitate quick temperature changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a helical heating element is used to allow thermal expansion and contraction, then the heating element can accommodate temperature changes, but the repeated thermal expansion and contraction causes creep strain and deformation leading to short-circuits and disconnection

Engineering Contradiction:
Improvethermal expansion accommodationVSAvoidheating element durability
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The heating element is designed with a waveform shape that allows dynamic movement and deformation without causing short-circuits. The waveform structure can expand and contract radially while maintaining electrical isolation, accommodating thermal cycles without compromising reliability

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The heating element transitions from a simple helical shape to a waveform shape with radial dimension variations. This adds another dimension of movement capability, allowing the element to expand and contract in the radial direction while maintaining its functional integrity and preventing short-circuits

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Speed

If the heating element is quickly cooled by blowing air to decrease temperature, then temperature adjustment speed is improved, but the repeated rise and drop in temperature increases the likelihood of deformation and disconnection

Engineering Contradiction:
Improvetemperature adjustment speedVSAvoidheating element stability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The waveform heating element is designed to dynamically accommodate rapid temperature changes through its flexible structure. The waveform shape allows the element to flex and move during rapid cooling and heating cycles, absorbing thermal shocks and preventing deformation that would lead to disconnection

Inventive Principle:
Principle #15Dynamics

3Stability of the object's composition

If a fixing member is attached to the heating element by welding to prevent accumulation of elongation, then the heating element position is stabilized, but the joined portion is exposed to high temperature causing stress concentration and deterioration of durability

Engineering Contradiction:
Improveheating element position stabilityVSAvoidjoined portion durability
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

A pin member is introduced as an intermediary component between the heating element and the heat insulating member. This pin member acts as a mediator that provides fixing functionality while being thermally isolated from the high-temperature heating element, preventing stress concentration and durability deterioration at the joined portion

Inventive Principle:
Principle #24Intermediary (Mediator)

4Device complexity

If a bar-like fixing member is used to fix the heating element, then the fixing structure is simple, but the fixing member may easily drop out of the heat insulating member resulting in insufficient holding force

Engineering Contradiction:
Improvefixing structure simplicityVSAvoidholding force
Core Design Contradiction:
Device complexityVSStrength

Solution Approach 1:

The pin member is designed with a curved or bent shape rather than a straight bar-like form. This curvature allows the pin to be inserted through the heat insulating member and bent back to create a locking mechanism, preventing the pin from dropping out while maintaining structural simplicity and providing sufficient holding force

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design allows for improved durability and reduced costs by enabling rapid temperature adjustments while preventing deformation and disconnection of heating elements, using inexpensive materials and enhancing assembly efficiency.

Implementation Method 1

a heating resistor disposed on an inner circumferential surface of the heat insulating member via a supporting member... The heating element can heat an inside of the furnace to a high temperature such as about 800° C. to 1000° C.

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

The heat insulating member can reduce a heat quantity lost as radiant heat and conductive heat, so as to enhance efficiency in heating.

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 3

the heating element undergoes a creep strain, and slowly increases in length over time. In addition, the heating element is thermally expanded during a heating operation.

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 4

there is an apparatus that quickly cools the heating element by blowing air thereto so as to decrease a temperature.

Methodology Applied
Scientific EffectForced convection: Forced Convection

Data Source

PatentUS8023806B2Heat processing furnace and vertical-type heat processing apparatus
Publication Date: 2011.09.20 TOKYO ELECTRON LTD
  • US8023806B2 patent drawing
  • US8023806B2 patent drawing
  • US8023806B2 patent drawing

AI summary

There is provided a heat processing furnace capable of quickly increasing and decreasing a temperature, while achieving improvement in durability. A heat processing furnace 2 comprises: a processing vessel 3 for accommodating an object to be processed w and performing thereto a heat process; and a cylindrical heater 5 disposed to surround an outer circumference of the processing vessel 3, for heating the object to be processed w. The heater 5 includes a cylindrical heat insulating member 16, and heating resistors 18 arranged along an inner circumferential surface of the heat insulating member 16. Each of the heating resistors 18 is formed of a strip-shaped member that is bent into a waveform having peak portions and trough portions. Pin members 20 are arranged in the heat insulating member 16 at suitable intervals therebetween, the pin members 20 holding the heating resistor 18 such that the heating resistor 18 is movable in a radial direction of the heater.