Waveguide Barrier Passage Layout to Block Cracks and Moisture

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Solution Overview

Problem

Conventional barrier structures for integrated circuits, designed to prevent moisture ingress and crack propagation, are compromised by the need for optical waveguides to pass through them, creating discontinuities that can lead to vulnerability in active circuitry.

Innovation Solution

A barrier structure with a passage for a waveguide that includes a reversal segment, allowing the waveguide to pass through while preventing crack and moisture propagation, by creating a non-linear path that reverses direction, thereby blocking crack propagation and impeding moisture ingress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a continuous ring barrier structure is used to prevent moisture ingress and crack propagation, then protection against mechanical deformities and foreign materials is improved, but the ability to allow optical waveguides to pass through is worsened

Engineering Contradiction:
Improveprotection against moisture ingress and crack propagationVSAvoidability to allow optical waveguides to pass through
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The barrier structure is segmented to include passages that allow waveguides to pass through while maintaining barrier functionality. The continuous ring is divided into sections with controlled discontinuities (passages) that accommodate optical components without compromising overall protection.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Passages act as intermediary elements that mediate between the barrier function and the waveguide transmission requirement. These passages are designed with specific geometries (including reversal segments) that allow optical signals to pass while blocking moisture and cracks.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If passages are created in the barrier structure to allow waveguides to pass through, then adaptability for photonic elements is improved, but vulnerability to cracks and moisture ingress is worsened

Engineering Contradiction:
Improveability to accommodate optical waveguidesVSAvoidvulnerability to cracks and moisture ingress
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The passages incorporate reversal segments with curved or non-linear geometries that force cracks to change direction or stop propagating. The curved paths create geometric barriers that impede linear crack propagation while still allowing optical waveguides to pass through.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The passage geometry is optimized with specific parameters (width, length, reversal segment configuration) that create different effects for different types of threats: narrow enough to block moisture and cracks, but sufficient to accommodate waveguides. The reversal segments change the effective path length and geometry to enhance protection.

Inventive Principle:
Principle #35Parameter changes

3Strength

If a continuous ring barrier structure is used, then crack propagation is impeded, but device complexity increases due to the need for discontinuities to accommodate waveguides

Engineering Contradiction:
Improvecrack propagation resistanceVSAvoidstructural complexity of barrier with passages
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The barrier is segmented into continuous sections separated by controlled passages. This segmentation allows the majority of the barrier to remain continuous for crack stopping, while localized passages provide necessary adaptability. The segmentation creates a modular structure that balances protection and functionality.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11740418B2Barrier structure with passage for waveguide in photonic integrated circuit
Publication Date: 2023.08.29 GLOBALFOUNDRIES US INC
  • US11740418B2 patent drawing
  • US11740418B2 patent drawing
  • US11740418B2 patent drawing

AI summary

Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is within the barrier structure, and extends from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure. A shape of the passage includes a reversal segment between the first end and the second end. A waveguide within the passage and extends from the first end to the second end of the barrier structure.