Waveguide Branch Circuit Phase Offset for Plasma Reflected Power
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in reducing reflected power when electromagnetic waves are branched and introduced to multiple locations, leading to increased power consumption and inefficiency.
Innovation Solution
The electromagnetic wave supply mechanism incorporates a first branch circuit configured as a waveguide, with a first waveguide branching into multiple second waveguides. The lengths of these second waveguides are designed to differ by a specific phase difference, optimizing the distribution of electromagnetic waves and reducing reflected power.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If electromagnetic waves are branched and introduced to multiple locations using conventional waveguide configurations, then the electromagnetic waves can be distributed to multiple processing zones, but reflected power increases leading to power consumption inefficiency
Solution Approach 1:
The patent applies asymmetry by making the waveguide lengths from the branch point to each output end different from one another. Specifically, each waveguide length is designed according to the formula L_i = L_0 + (i-1)×ΔL, where ΔL is a predetermined length difference. This asymmetric configuration prevents standing waves and minimizes reflected power by ensuring that reflected waves from different branches do not constructively interfere, thereby resolving the contradiction between multi-location distribution and reflected power reduction.
Solution Approach 2:
The patent changes the physical parameter of waveguide length to optimize system performance. By adjusting the length of each waveguide segment according to a specific mathematical relationship (adding incremental length differences), the system transforms the uniform parameter configuration into a non-uniform one that reduces reflected power while maintaining effective electromagnetic wave distribution across multiple locations.
2Loss of energy
If waveguide lengths are made different to reduce reflected power, then energy efficiency improves, but the device complexity and manufacturing precision requirements increase
Solution Approach 1:
The patent segments the waveguide system into multiple distinct sections with different lengths, where each segment corresponds to a specific branch. By dividing the overall waveguide structure into manageable segments with controlled length differences, the system achieves reflected power reduction while making the manufacturing process more manageable through modular construction approaches.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces reflected power when electromagnetic waves are branched, leading to improved efficiency and reduced power consumption of the radio-frequency power source.
Implementation Method 1
a first branch circuit provided downstream of a radio-frequency power source that generates an electromagnetic wave, the first branch circuit being configured as a waveguide
Implementation Method 2
lengths of the plurality of second waveguides from the branch point to the n output ends differ from each other by m×λ/2+(λ/2)/n
Data Source
AI summary
An electromagnetic wave supply mechanism for supplying an electromagnetic wave into a processing container serving as a load, includes a first branch circuit provided downstream of a radio-frequency power source for generating the electromagnetic wave. The first branch circuit includes a first waveguide having an input end, a plurality of second waveguides having respective output ends, and a branch point at which the first waveguide is branched into the second waveguides corresponding to n branches. Each output end is connected to the load or an input end of a second branch circuit subsequent to the first branch circuit. In the first branch circuit, when a total number of the output ends seen from the branch point is n, lengths of the second waveguides from the branch point to the n output ends differ from each other by m×λ/2+(λ/2)/n.