Waveguide Identification Pattern for Diced Photonics Chips

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Solution Overview

Problem

Silicon photonics chips lack electrical probing capabilities, making it impossible to track and identify individual dies after dicing from the wafer.

Innovation Solution

Implementing a grating coupler with damaged regions visible only in infrared light, created using an external laser to induce scattering spots in unique patterns on waveguide structures, enabling identification through an infrared camera and decoder system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If electrical fuses are used for chip identification, then electrical probing can be performed to return binary code, but silicon photonics chips lack electrical probing functionalities making this method inapplicable

Engineering Contradiction:
Improvechip identification capabilityVSAvoidelectrical probing functionality
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The patent replaces the electrical probing system with an optical probing system. Instead of using electrical fuses and electrical probes, the invention uses optical gratings, waveguides, and infrared cameras to read identification patterns. The mechanical/electrical interaction is substituted with optical interaction, allowing identification of photonics chips that lack electrical probing functionalities.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the domain of identification from electrical parameters (binary code through electrical fuses) to optical parameters (light scattering patterns through optical gratings). By changing the physical parameter domain from electrical to optical, the system becomes compatible with silicon photonics chips that have optical but not electrical probing capabilities.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If optical gratings with damaged regions are used for identification, then chip tracking is enabled without electrical connections, but the method requires infrared light and specialized detection equipment

Engineering Contradiction:
Improveidentification capability without electrical connectionsVSAvoidinfrared camera and decoder system
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent introduces optical gratings and waveguides as intermediary structures that encode identification information in visible light scattering patterns. These intermediaries translate the invisible infrared damage patterns into visible optical signals that can be captured by standard cameras, reducing the need for specialized infrared detection equipment.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If damaged regions are created using external laser, then unique scattering spots are induced for identification, but the manufacturing process requires precise laser control and positioning

Engineering Contradiction:
Improveunique pattern creationVSAvoidlaser processing complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent performs preliminary actions by first fabricating the optical gratings and waveguides with high precision using standard photolithography techniques, then subsequently using the laser to create damage patterns. The preliminary structural fabrication establishes the optical pathways, and the laser damage patterns are superimposed afterward, separating the precision structural work from the identification marking work.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables tracking and identification of photonics chips without electrical connections, using infrared light to decode unique patterns for chip identification.

Implementation Method 1

at least one damaged region for inducing scattering spots positioned in a unique pattern on the at least one waveguide structure

Methodology Applied
Scientific EffectLight scattering: Scattering

Implementation Method 2

using infrared light to decode unique patterns for chip identification

Methodology Applied
Scientific EffectInfrared radiation: Infrared Radiation

Data Source

PatentEP4382976B1Identification system
Publication Date: 2026.03.11 GLOBALFOUNDRIES US INC
  • EP4382976B1 patent drawingFigure 1
  • EP4382976B1 patent drawingFigure 2A~2D
  • EP4382976B1 patent drawingFigure 3~4

AI summary

The present disclosure relates to semiconductor structures and, more particularly, to an identification system, method of manufacture and method of use. The structure includes at least one waveguide structure and at least one damaged region positioned in a unique pattern on the at least one waveguide structure.