Tunable In-Pool Waveguide Cladding for Modulator-Free Loss Tuning

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Solution Overview

Problem

Existing waveguide loss tuning methods in photonics integrated circuits (PICs) are costly and space-consuming, particularly due to the integration of optical modulators, and do not allow for in-pool tuning, which is necessary for applications like LiDAR.

Innovation Solution

Integrating a first and second waveguide cladding with different refractive indices into the PIC, allowing for in-pool waveguide loss tuning through annealing and heater control, eliminating the need for a space-consuming modulator.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If optical modulators are integrated into PICs for waveguide loss tuning, then waveguide loss tuning capability is achieved, but device area and manufacturing cost increase

Engineering Contradiction:
Improvewaveguide loss tuning capabilityVSAvoiddevice area
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent extracts the waveguide loss tuning function from the traditional optical modulator and implements it directly through the waveguide cladding structure. By removing the separate modulator component and embedding the tuning capability within the waveguide itself, the solution achieves waveguide loss tuning without occupying additional device area.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent merges the waveguide structure and loss tuning function into a single integrated component. The cladding layer is combined with the waveguide core to form a unified structure that simultaneously guides light and provides adjustable loss characteristics, eliminating the need for separate modulator hardware.

Inventive Principle:
Principle #5Merging (Combining)

2Adaptability or versatility

If optical modulators are integrated into PICs for waveguide loss tuning, then waveguide loss tuning capability is achieved, but manufacturing cost increases

Engineering Contradiction:
Improvewaveguide loss tuning capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent extracts the tuning function from expensive optical modulators and implements it through standard semiconductor fabrication processes. By using conventional deposition and annealing techniques already present in PIC manufacturing, the solution eliminates the need for costly modulator integration while maintaining tuning capability.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent employs a simple oxide cladding layer that can be deposited and modified using low-cost fabrication processes. The cladding material serves as a disposable, easily manufacturable component that provides the desired tuning function without requiring expensive or complex structures.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Adaptability or versatility

If traditional waveguide tuning methods are used, then waveguide loss can be adjusted, but in-pool tuning is not enabled, limiting LiDAR applications

Engineering Contradiction:
Improvein-pool tuning capabilityVSAvoidapplication suitability for LiDAR
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent applies local quality by enabling independent tuning of waveguide loss specifically in the pool region where LiDAR functions are implemented. The cladding structure allows selective modification of refractive index in the pool area through localized annealing, providing the in-pool tuning capability required for LiDAR while leaving other PIC regions unaffected.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables flexible and cost-effective waveguide loss tuning at various stages of fabrication, improving PIC yield and performance without the need for a modulator, suitable for applications such as LiDAR.

Implementation Method 1

allowing for in-pool waveguide loss tuning through annealing

Methodology Applied
Scientific EffectAnnealing: Annealing

Implementation Method 2

through annealing and heater control

Methodology Applied
Scientific EffectHeating: Heating

Data Source

PatentUS12429401B2Tunable in-pool waveguide and method
Publication Date: 2025.09.30 INTEL CORP
  • US12429401B2 patent drawing
  • US12429401B2 patent drawing
  • US12429401B2 patent drawing

AI summary

A photonics integrated circuit includes a first waveguide and a second waveguide. A portion of the first waveguide has a first cladding with a first refractive index. The second waveguide includes a second cladding with a second refractive index different from the first refractive index. Also disclosed is a test circuit for a photonics integrated circuit. The test circuit can be used to determine waveguide losses, and used to tune the waveguide losses.