Waveguide Dielectric Structure for Low-Leakage Optical Alignment
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Solution Overview
Problem
Existing semiconductor devices face challenges in maintaining efficient optical signal transfer due to substrate leakage and misalignment issues, which can lead to reduced signal quality and efficiency.
Innovation Solution
The semiconductor device incorporates a waveguide structure with a first and second dielectric structure that provides structural support, inhibiting substrate removal and preventing signal leakage while maintaining alignment with optical components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate is removed to improve optical signal transfer, then signal quality improves, but structural support is lost causing misalignment
Solution Approach 1:
The patent extracts only the necessary portion of the substrate for optical signal transfer while retaining the structural support function through the waveguide structure. The waveguide is positioned over the substrate such that the substrate can be selectively removed in certain regions to improve optical coupling while the waveguide itself provides the necessary structural support for alignment.
Solution Approach 2:
The substrate is segmented into regions with different functions: areas where the substrate is retained for structural support and areas where it is removed for optimal optical signal transfer. The waveguide structure is also segmented with specific portions positioned to provide support while allowing optical coupling through or near substrate regions.
2Reliability
If the waveguide is positioned closer to the substrate to reduce leakage, then signal quality improves, but manufacturing precision requirements increase
Solution Approach 1:
The waveguide structure is designed to be self-aligning with the substrate through geometric features and material properties. The waveguide's position and orientation are determined by its interaction with the substrate and surrounding structures, reducing the need for high-precision external alignment during manufacturing.
Solution Approach 2:
The patent optimizes parameters such as the waveguide's height above the substrate, its lateral positioning, and its cross-sectional dimensions to achieve optimal signal quality while maintaining relaxed manufacturing tolerances. Specific geometric parameters are chosen to balance optical performance with manufacturability.
Data Source
AI summary
A semiconductor device is provided. The semiconductor device includes a waveguide over a substrate. The semiconductor device includes a first dielectric structure over the substrate, wherein a portion of the waveguide is in the first dielectric structure. The semiconductor device includes a second dielectric structure under the waveguide, wherein a first sidewall of the second dielectric structure is adjacent a first sidewall of the substrate.