Waveguide Filtering Device Using Metal Vias

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Solution Overview

Problem

Integrated photonic circuits face disturbances due to parasitic optical modes caused by inhomogeneities and geometry variations in waveguides, which existing filtering devices often fail to adequately address without impacting the guided optical mode.

Innovation Solution

A filtering device is implemented with metal vias along and beside the waveguide, configured to absorb less than 5% of the guided optical mode's power, and a metal strip or absorbing material to absorb parasitic modes, maintaining minimal impact on the guided mode while effectively filtering parasitic radiation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a parasitic mode filtering device is added to the waveguide, then parasitic modes are filtered, but the device complexity increases

Engineering Contradiction:
Improvefiltering of parasitic modesVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The filtering function is segmented into multiple metal vias distributed along the waveguide rather than a single complex filter structure. The vias are placed at specific intervals (e.g., every 0.5-2 μm) to collectively suppress parasitic modes through cumulative absorption, simplifying the overall device architecture while maintaining filtering effectiveness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Metal vias act as intermediary elements between the parasitic modes and the ground plane. These vias provide a controlled impedance path that absorbs parasitic mode energy through resistive losses, converting optical energy to heat without requiring complex filter structures. The vias serve as intermediate absorption points that gradually attenuate parasitic modes along the waveguide propagation path.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If metal vias are placed close to the waveguide to filter parasitic modes, then filtering effectiveness increases, but absorption of guided mode power increases

Engineering Contradiction:
Improvefiltering effectivenessVSAvoidguided mode power absorption
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The metal vias are positioned at specific lateral distances (e.g., 0.2-1.0 μm) and longitudinal intervals along the waveguide to create localized filtering zones. This spatial distribution ensures that each via interacts primarily with parasitic modes while minimizing coupling with the guided mode, achieving effective filtering with minimal guided mode loss (typically <0.1 dB per via).

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Multiple metal vias are distributed along the waveguide to provide cumulative filtering action. Rather than using a single via close to the waveguide (which would cause high guided mode loss), several vias are placed at optimized intervals to collectively suppress parasitic modes through gradual absorption, achieving the required filtering effectiveness with lower total loss to the guided mode.

Inventive Principle:
Principle #16Partial or excessive action

3Object-generated harmful factors

If the waveguide dimensions are reduced to minimize parasitic modes, then parasitic mode generation decreases, but the guided mode transmission efficiency decreases

Engineering Contradiction:
Improveparasitic mode generationVSAvoidguided mode transmission
Core Design Contradiction:
Object-generated harmful factorsVSLoss of energy

Solution Approach 1:

Metal vias are placed upstream of critical waveguide sections (such as bends or coupling regions) where parasitic modes are most likely to generate. This preliminary filtering action suppresses parasitic modes before they can be excited by geometric variations, preventing rather than correcting the problem and maintaining guided mode transmission efficiency.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The metal vias convert the potentially harmful interaction between parasitic modes and waveguide inhomogeneities into a beneficial filtering mechanism. By introducing controlled absorption elements (the vias), the system transforms uncontrolled parasitic mode generation into a managed attenuation process, where parasitic energy is deliberately absorbed and converted to heat, preventing it from causing disturbances downstream.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively filters parasitic modes with minimal absorption of the guided optical mode, ensuring reliable operation of integrated photonic circuits by maintaining low power loss and reflection.

Implementation Method 1

the vias are configured to at least partly absorb a parasitic optical mode radiated from the portion of the waveguide

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

a metal strip parallel to a plane orthogonal to the vias, arranged at least partly opposite the portion of the waveguide and configured to at least partly absorb a parasitic optical mode radiated from the portion of the waveguide

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Data Source

PatentUS11169325B2Filtering device in a waveguide
Publication Date: 2021.11.09 STMICROELECTRONICS (CROLLES 2) SAS
  • US11169325B2 patent drawing
  • US11169325B2 patent drawing

AI summary

An optical waveguide is configured to propagate a light signal. Metal vias are arranged along and on either side of a portion of the optical waveguide. Additional metal vias are further arranged along and on either side of the optical waveguide both upstream and downstream of the portion of the optical waveguide. The metal vias and additional metal vias are oriented orthogonal to a same plane, the same plane being orthogonal to a transverse cross-section of the portion of the optical waveguide.