Optical Waveguide Groove Insertion for Mask Alignment
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Solution Overview
Problem
The manufacturing process of optical waveguides is complicated due to the difficulty in aligning masks for forming metal layers on 45-degree inclined parts, and the use of liquid state materials limits the application to film-shaped materials, preventing the use of film materials and increasing processing complexity.
Innovation Solution
The optical waveguide is formed with a core and clad layer on a substrate, featuring concave parts with light propagation direction changing parts inserted to create a predetermined inclination angle, allowing for simpler processing and compatibility with both liquid and film-shaped materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If metal layers are formed on 45-degree inclined parts using conventional methods, then light propagation direction can be changed, but mask alignment becomes difficult and manufacturing process becomes complicated
Solution Approach 1:
Instead of forming metal layers on inclined parts of grooves (conventional approach), the invention inverts the approach by forming grooves around vertically inserted metal layers. This inversion eliminates the need for complex mask alignment on inclined surfaces, as the metal layers are deposited on vertical surfaces which are much easier to align with standard photolithography masks.
Solution Approach 2:
The invention segments the formation process into distinct steps: first forming the groove structure, then inserting metal layers vertically into the groove. This segmentation allows each step to be optimized independently - the groove formation can be done with standard photolithography while the metal layer insertion is simplified by the vertical orientation.
2Ease of manufacture
If liquid state materials are used for optical waveguide formation, then processing is simplified, but material selection is limited and film materials cannot be used
Solution Approach 1:
The groove structure serves multiple functions: it contains the optical waveguide material, provides mechanical support, and enables the insertion of metal layers for light direction control. This universal structure works equally well with both liquid state materials and film materials, eliminating the limitation to only liquid materials while maintaining processing simplicity.
3Ease of operation
If grooves with 45-degree inclined parts are formed, then light propagation direction can be changed, but the forming process becomes complicated
Solution Approach 1:
Instead of creating complex 45-degree inclined grooves to achieve light direction control, the invention inverts the approach by using vertical metal layers surrounded by grooves. The light direction control is achieved through the vertical metal layer structure rather than through inclined groove surfaces, simplifying the groove forming process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method simplifies the formation of light propagation direction changing parts, reduces processing time, and enables the use of various materials, improving the manufacturing efficiency and versatility of optical waveguides.
Implementation Method 1
A refractive index of the core layer 102 is designed to be higher than that of the clad layer 103, so that the light entering the core layer 102 propagates within the core layer 102 without transmitting through the clad layer 103.
Data Source
AI summary
A manufacturing method of an optical waveguide, the optical waveguide including a first clad layer; a core layer formed on the first clad layer and configured to propagate light; a second clad layer formed on the first clad layer so as to cover the core layer; and a light propagation direction changing part configured to change a propagation direction of the light propagating in the core layer; the manufacturing method of the optical waveguide includes the steps of forming a concave part penetrating the first clad layer and the core layer; and inserting the light propagation direction changing part into the concave part so that a light propagation direction changing surface of the light propagation direction changing part forms a predetermined inclination angle to a predetermined reference plane.