Waveguide Heater Layout for Precise Phase Modulation

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Achieving high-speed optical modulation in semiconductor photonics, particularly in Mach-Zehnder modulators, is challenging due to difficulties in effectively modulating lasers directly, necessitating external optical modulators that require precise thermal and electric field manipulation of waveguides.

Innovation Solution

Incorporating a heater within the alpha or beta interconnection layers of a semiconductor device, using materials like tantalum nitride or titanium nitride, to selectively heat waveguides, allowing for precise control of refractive index changes and phase shifts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If direct laser modulation is used to achieve high-speed optical communication, then the system complexity is reduced, but the modulation speed cannot meet 10 GBit/s and above requirements

Engineering Contradiction:

Improvesystem complexityVSAvoidmodulation speed

Core Design Contradiction:

Device complexityVSSpeed

Solution Approach 1:

The patent introduces an external optical modulator as an intermediary component between the laser and the optical fiber. This modulator uses thermo-optic and electro-optic effects to modulate the optical signal, enabling high-speed communication (10 GBit/s and above) while keeping the laser itself simple and manageable.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Speed

If an external optical modulator is used to achieve high-speed modulation, then the modulation speed increases to 10 GBit/s and above, but the device complexity increases due to additional components

Engineering Contradiction:

Improvemodulation speedVSAvoiddevice complexity

Core Design Contradiction:

SpeedVSDevice complexity

Solution Approach 1:

The patent combines multiple functions into a single integrated modulator device. The modulator integrates both thermo-optic modulation (for wavelength control) and electro-optic modulation (for high-speed data transmission), eliminating the need for separate components and reducing overall system complexity despite the high performance requirements.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The optical modulator is designed to perform multiple functions: it serves as both a wavelength tuner (using thermo-optic effect) and a high-speed data modulator (using electro-optic effect). This multi-functionality reduces the total component count and simplifies the system architecture while achieving 10 GBit/s and above modulation speeds.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Temperature

If conventional heating methods are used for waveguide thermal control, then the thermal control is achieved, but the power efficiency and heat delivery precision are insufficient

Engineering Contradiction:

Improvewaveguide temperature controlVSAvoidpower efficiency

Core Design Contradiction:

TemperatureVSUse of energy by moving object

Solution Approach 1:

The patent implements localized heating through precisely positioned heating elements that are coupled to specific waveguide regions. This allows thermal control to be applied only where needed, improving power efficiency by avoiding unnecessary heating of entire waveguide structures and enabling precise wavelength tuning through localized thermal fields.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent replaces conventional bulk heating methods with electrically-controlled resistive heating elements integrated into the waveguide structure. This substitution enables precise, rapid, and power-efficient thermal control by using electrical fields to generate heat directly at the target location, improving both power efficiency and temperature control precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient and power-efficient modulation of optical signals, enhancing the speed and performance of semiconductor photonics devices by improving heat delivery and control to waveguides.

Implementation Method 1

Incorporating a heater within the alpha or beta interconnection layers of a semiconductor device, using materials like tantalum nitride or titanium nitride, to selectively heat waveguides

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Implementation Method 2

A material which is thermo-optic effective (TOE) changes refractive index in response to changes in temperature

Methodology Applied

Scientific EffectThermo-optic effect:

Data Source

PatentUS20260016710A1Optical device including waveguide heater

Publication Date: 2026.01.15 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

An optical device includes: a waveguide having first and second arcuate-shaped segments; and a heater having a rectangular-shaped segment, the rectangular-shaped segment of the heater overlapping the first and second arcuate-shaped segments of the waveguide.