Waveguide ID Patterning for Tracking Diced Silicon Photonics Chips

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Solution Overview

Problem

Silicon photonics chips without electrical probing functionalities cannot be identified after being diced from the wafer, as there are no existing tracking methods for these chips.

Innovation Solution

A photonics structure with damaged regions in unique patterns on waveguide structures, which are invisible in optical light but visible in infrared, is used to encode identification information. These damaged regions are created using an external laser and can be read by an infrared camera to decode the chip's identity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of information

If damaged regions are created in waveguide structures for identification, then unique pattern identification is achieved, but the damaged regions are invisible in optical light and require infrared detection

Engineering Contradiction:
Improveidentification informationVSAvoidvisibility of damaged regions
Core Design Contradiction:
Loss of informationVSDifficulty of detecting and measuring

Solution Approach 1:

The patent transitions from visible optical light to infrared wavelength for detection. The damaged regions in the waveguide structure do not scatter or absorb visible light significantly, making them invisible in optical light. However, they interact strongly with infrared light, allowing detection in this different wavelength dimension. This dimensional change in the electromagnetic spectrum enables the identification system to work.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for the identification of photonics chips without electrical probing capabilities, enabling tracking of bare dies after dicing and providing a unique identification system for silicon photonics chips.

Implementation Method 1

making the regions visible only in infrared light, allowing for identification through an infrared camera

Methodology Applied
Scientific EffectLight scattering: Scattering

Data Source

PatentUS12332480B2Identification system
Publication Date: 2025.06.17 GLOBALFOUNDRIES US INC
  • US12332480B2 patent drawing
  • US12332480B2 patent drawing
  • US12332480B2 patent drawing

AI summary

The present disclosure relates to semiconductor structures and, more particularly, to an identification system, method of manufacture and method of use. The structure includes at least one waveguide structure and at least one damaged region positioned in a unique pattern on the at least one waveguide structure.