Optical Waveguide Light Path Conversion Mirror Fabrication

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Solution Overview

Problem

The existing methods for forming light path conversion mirrors in optical waveguides are costly due to the need for micro fabrication techniques like excimer laser machining or high-precision photolithography, and often result in issues such as metal layer peeling or deformation, leading to low yield and increased costs.

Innovation Solution

A method involving the formation of a groove portion with a light path conversion inclined surface and sidewall surface, followed by the deposition of a metal layer, which is then sealed with a protection insulating layer, and the unnecessary metal layer on the sidewall surface is removed using a concave portion that penetrates the core layer, preventing adhesion or deformation of the metal layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If excimer laser machining or high-performance photolithography is used to remove metal layer on sidewall surfaces, then manufacturing precision is improved, but manufacturing cost increases

Engineering Contradiction:

Improvemetal layer removal precisionVSAvoidmanufacturing cost

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The groove portion is divided into two distinct surfaces: a light path conversion inclined surface and a sidewall surface. This segmentation allows different metal layer removal strategies to be applied to each surface, enabling precision removal on the inclined surface while avoiding complex processing on the sidewall surface.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention extracts and removes only the metal layer from the sidewall surface while preserving the metal layer on the light path conversion inclined surface. This selective removal eliminates the need for expensive micro-fabrication techniques by targeting only the necessary metal layer for removal.

Inventive Principle:

Principle #2Taking out (Extraction)

2Ease of manufacture

If cutting device is used to remove metal layer on sidewall surface, then manufacturing cost decreases, but reliability worsens due to metal layer peeling or deformation

Engineering Contradiction:

Improvemanufacturing costVSAvoidmetal layer integrity

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The groove portion is designed with different surface characteristics: the light path conversion inclined surface maintains its metal layer for optical function, while the sidewall surface has its metal layer removed to prevent defects. This local differentiation ensures high reliability by protecting the functional metal layer while eliminating potential defect sources.

Inventive Principle:

Principle #3Local quality

3Reliability

If metal layer is formed on groove portion including sidewall surface, then light path conversion mirror is formed, but object-generated harmful factors increase due to metal layer adhesion or peeling

Engineering Contradiction:

Improvelight path conversion mirror qualityVSAvoidmetal layer defects

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The invention converts the potentially harmful metal layer on the sidewall surface into a beneficial configuration by selectively removing it. This eliminates the source of cutting shavings adhesion and metal layer peeling defects, while the remaining metal layer on the light path conversion inclined surface continues to provide the necessary optical reflection function.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the formation of light path conversion mirrors at a lower cost with improved yield, as the metal layer is protected and easily removable without damaging the underlying structures, enabling efficient light path conversion without the need for expensive micro fabrication techniques.

Implementation Method 1

forming selectively a metal layer on the light path conversion inclined surface and the sidewall surface of the groove portion

Methodology Applied

Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS8634683B2Optical waveguide device and method of manufacturing the same

Publication Date: 2014.01.21 SHINKO ELECTRIC IND CO LTD

AI summary

A method of manufacturing an optical waveguide device, includes obtaining an optical waveguide by forming sequentially a first cladding layer, a core layer, and a second cladding layer on a substrate, forming a groove portion including a light path conversion inclined surface and a sidewall surface which intersects with it, and the groove portion dividing the second cladding layer and the core layer, on both end sides of the optical waveguide respectively, forming selectively a metal layer on the light path conversion inclined surface and the sidewall surface of the groove portion, forming a protection insulating layer sealing the metal layer on the optical waveguide, and obtaining a light path conversion mirror that the metal layer is formed on the light path conversion inclined surface, by forming a concave portion which penetrates the core layer from the protection insulating layer to remove the metal layer formed on the sidewall surface of the groove portion.