Waveguide Photodetector Absorber Thickness Optimization

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Solution Overview

Problem

Current waveguide photodetectors face challenges in achieving high-speed operation and sufficient light absorption efficiency, particularly at data transmission speeds above 30 GHz, due to variations in capacitance and electron movement time related to absorber thickness.

Innovation Solution

A waveguide photodetector design incorporating a semiconductor substrate with sequentially laminated optical waveguides, a refractive index matching layer, and an absorber, where the absorber is an intrinsic semiconductor layer with a thickness between 0.12 μm and 0.2 μm, and a clad layer with opposite conductive type, optimized to enhance light absorption and reduce capacitance for faster operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the absorber thickness is increased to improve light absorption efficiency, then the light absorption rate increases, but the capacitance and electron movement time increase, reducing operation speed

Engineering Contradiction:
Improvelight absorption efficiencyVSAvoidoperation speed
Core Design Contradiction:
ReliabilityVSSpeed

Solution Approach 1:

The patent optimizes the absorber thickness to a specific range (0.12-0.2 μm) to achieve the best balance between light absorption efficiency and operation speed. This parameter optimization resolves the contradiction by finding the critical thickness value that maximizes both performance metrics simultaneously.

Inventive Principle:
Principle #35Parameter changes

2Speed

If the absorber thickness is decreased to reduce capacitance and improve operation speed, then the operation speed increases, but the light absorption efficiency decreases

Engineering Contradiction:
Improveoperation speedVSAvoidlight absorption efficiency
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent determines the optimal absorber thickness range (0.12-0.2 μm) through parameter optimization. This specific thickness range ensures that the photodetector achieves high operation speed while maintaining sufficient light absorption efficiency, resolving the trade-off between these two parameters.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If a conventional single-layer waveguide structure is used, then the device complexity is low, but the light absorption efficiency and operation speed are insufficient for high-speed applications

Engineering Contradiction:
Improvelight absorption efficiencyVSAvoidwaveguide structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent divides the waveguide structure into multiple sequential layers (first optical waveguide layer, second optical waveguide layer, third optical waveguide layer, and fourth optical waveguide layer). This segmentation allows each layer to contribute to light absorption and signal detection, achieving high light absorption efficiency and operation speed while maintaining a relatively simple overall structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs a composite waveguide structure made of different semiconductor materials with varying bandgaps (InP, InGaAsP, InGaAs). This composite structure enables efficient light absorption across different wavelengths and improves overall detection performance, resolving the contradiction between performance and structural simplicity.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enables high-speed operation and increased light absorption efficiency by minimizing capacitance and charge movement time, while maintaining a balance between absorber thickness and responsivity, thereby improving data transmission performance.

Implementation Method 1

a light absorber absorbs light to generate an electron and a hole

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 2

a light absorber absorbs light to generate an electron and a hole. As each of the generated electron and hole moves to an electrode, an electrical signal may be detected

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 3

a refractive index matching layer disposed on the second portion of the second optical waveguide

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS11500150B2Waveguide photodetector
Publication Date: 2022.11.15 ELECTRONICS & TELECOMM RES INST
  • US11500150B2 patent drawing
  • US11500150B2 patent drawing
  • US11500150B2 patent drawing

AI summary

Provided is a waveguide photodetector including a semiconductor substrate, a first optical waveguide and a second optical waveguide, which are sequentially laminated on the semiconductor substrate, in which each of the first optical waveguide and the second optical waveguide includes a first portion and a second portion, and the first portion extends from the second portion in a first direction parallel to a top surface of the semiconductor substrate, a refractive index matching layer disposed on the second portion of the second optical waveguide, a clad layer disposed on the refractive index matching layer, and an absorber disposed between the refractive index matching layer and the clad layer. Here, the second optical waveguide has a first conductive-type, the clad layer has a second conductive-type opposite to the first conductive-type, and the refractive index matching layer includes a first semiconductor layer that is an intrinsic semiconductor layer.