Waveguide Thickness Variation With Index-Matched Slope Compensation

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Solution Overview

Problem

Existing augmented reality technologies face challenges in forming substrates with a thickness distribution at eyepiece areas that enhance performance and functionality.

Innovation Solution

A waveguide substrate with a thickness distribution is formed by depositing an index-matched layer with a device slope that matches the waveguide slope, creating a uniform thickness distribution across the substrate, including gratings for light beam manipulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a waveguide substrate with thickness distribution is formed, then light transmission and viewing angle are improved, but manufacturing precision and uniformity of the substrate become more difficult to control

Engineering Contradiction:
Improvelight transmissionVSAvoidsubstrate thickness uniformity
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by creating a waveguide substrate with non-uniform thickness distribution, where the thickness varies across different regions of the substrate. This local variation in thickness is specifically designed to optimize light transmission and viewing angle in eyepiece areas while maintaining control over manufacturing precision through the index-matched layer that compensates for the thickness variations.

Inventive Principle:
Principle #3Local quality

2Ease of operation

If an index-matched layer is deposited to match the waveguide slope, then viewing angle and image quality are enhanced, but device complexity and manufacturing steps increase

Engineering Contradiction:
Improveviewing angleVSAvoidmanufacturing steps
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by pre-forming the waveguide substrate with a specific thickness distribution and slope before depositing the index-matched layer. This preliminary preparation of the substrate geometry allows the subsequent index-matched layer deposition to be more straightforward and controlled, enhancing viewing angle while managing device complexity through planned sequential manufacturing steps.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the performance of the substrate by improving light transmission and viewing angle, providing a consistent and efficient virtual image display.

Implementation Method 1

depositing an index-matched layer onto a surface of the waveguide

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Implementation Method 2

index-matched layer having a first surface disposed on the waveguide substrate and a second surface opposing the first surface, wherein the index-matched layer is disposed over a portion of the waveguide substrate

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS12510707B2Total or local thickness variation for optical devices
Publication Date: 2025.12.30 APPLIED MATERIALS INC
  • US12510707B2 patent drawing
  • US12510707B2 patent drawing
  • US12510707B2 patent drawing

AI summary

Embodiments of the present disclosure generally relate to methods for forming a waveguide. Methods may include measuring a waveguide substrate, the waveguide having a substrate thickness distribution; and depositing an index-matched layer onto a surface of the waveguide, the index-matched layer having a first surface disposed on the waveguide substrate and a second surface opposing the first surface, wherein the index-matched layer is disposed only over a portion of the waveguide substrate, and a device slope of a second surface of the index-matched layer is substantially the same as the waveguide slope of the first surface of the waveguide.