Wavelength Converting Optical System Simplification

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Solution Overview

Problem

Conventional wavelength converting optical systems for generating an eighth harmonic wave are complex and require the superimposition of fundamental and seventh harmonic waves, which is difficult to adjust and results in poor durability due to the use of dichroic mirrors for deep ultraviolet light.

Innovation Solution

A simplified wavelength converting optical system that eliminates the need for superimposing fundamental and seventh harmonic waves, using a series connection of seventh and eighth harmonic wave forming optical elements without cylindrical lenses for walk-off correction, and employing a CLBO crystal to reduce walk-off and maintain focusing characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional wavelength converting optical systems are used to generate eighth harmonic wave, then wavelength conversion can be achieved, but the system becomes complex and requires superimposition of fundamental and seventh harmonic waves which is difficult to adjust

Engineering Contradiction:
Improvewavelength conversion efficiencyVSAvoidoptical system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the dichroic mirror component from the optical system. By using a single LBO crystal to generate both the seventh and eighth harmonic waves simultaneously, the system removes the need for separate superimposition optics and dichroic mirrors, thereby simplifying the overall device complexity while maintaining wavelength conversion efficiency

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent merges the seventh harmonic wave generation and eighth harmonic wave generation processes into a single LBO crystal. The fundamental wave and seventh harmonic wave are generated and combined within the same crystal, eliminating the need for separate optical paths and superimposition components, thus reducing device complexity

Inventive Principle:
Principle #5Merging (Combining)

2Manufacturing precision

If dichroic mirrors are used for deep ultraviolet light in conventional systems, then wavelength separation can be achieved, but durability deteriorates due to poor durability of dichroic mirrors for deep ultraviolet light

Engineering Contradiction:
Improvewavelength separation capabilityVSAvoiddurability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent removes the dichroic mirror from the optical system entirely. By generating the seventh and eighth harmonic waves simultaneously in a single LBO crystal and using spatial separation of the output beams, the system eliminates the need for dichroic mirrors that would otherwise be required for wavelength separation, thereby improving durability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The LBO crystal acts as an intermediary that simultaneously generates both the seventh and eighth harmonic waves. This crystal-based approach replaces the need for dichroic mirror-based wavelength separation, providing a more durable solution for deep ultraviolet light handling

Inventive Principle:
Principle #24Intermediary (Mediator)

3Shape

If cylindrical lenses are used for walk-off correction in conventional systems, then beam shaping can be achieved, but device complexity increases

Engineering Contradiction:
Improvebeam cross-sectional shapeVSAvoidoptical element quantity
Core Design Contradiction:
ShapeVSDevice complexity

Solution Approach 1:

The patent removes the cylindrical lenses from the optical system. By optimizing the interaction geometry within the LBO crystal and utilizing the natural walk-off characteristics, the system achieves the desired beam shaping without requiring additional cylindrical lenses, thereby reducing device complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the operational parameters of the LBO crystal, specifically the interaction angle and crystal orientation, to optimize the walk-off effect. By adjusting these parameters, the system achieves acceptable beam cross-sectional shape without requiring additional beam shaping components

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves efficient wavelength conversion with improved durability and reduced complexity by eliminating the need for dichroic mirrors and minimizing walk-off, enabling the generation of an eighth harmonic wave with enhanced focusing characteristics.

Implementation Method 1

a seventh harmonic wave forming optical element which forms a seventh harmonic wave from the second harmonic wave and the fifth harmonic wave; and an eighth harmonic wave forming optical element which forms an eighth harmonic wave from the second fundamental wave and the seventh harmonic wave

Methodology Applied
Scientific EffectNonlinear optical conversion: Second Harmonic Generation

Data Source

PatentUS7623557B2Wavelength converting optical system, laser light source, exposure apparatus, mask examining apparatus, and macromolecular crystal lens machining device
Publication Date: 2009.11.24 NIKON CORP
  • US7623557B2 patent drawing
  • US7623557B2 patent drawing
  • US7623557B2 patent drawing

AI summary

A fifth harmonic wave is formed from a fundamental wave of p-polarized light via a second harmonic wave forming optical element 3, a third harmonic wave forming optical element 4, and a fifth harmonic wave forming optical element 6 and a second harmonic wave of p-polarized light is formed from a fundamental wave of s-polarized light by a second harmonic wave forming optical element 9. The fifth harmonic wave of p-polarized light that is subjected to beam shaping by cylindrical lenses 7 and 8, the fundamental wave of s-polarized light, and the second harmonic wave of p-polarized light are combined by a dichroic mirror 10, and are incident on a seventh harmonic wave forming optical element 11. Furthermore, a seventh harmonic wave of s-polarized light is formed from the second harmonic wave and fifth harmonic wave of p-polarized light, and this seventh harmonic wave is mixed with the fundamental wave of s-polarized light in an eighth harmonic wave forming optical element 12, so that an eighth harmonic wave of p-polarized light is formed. As a result, an eighth harmonic wave can be formed in a simpler optical system than a conventional optical system.