WDS Spectrum Mapping by Scanning Analyzing Element Positions
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Solution Overview
Problem
Wavelength-dispersive X-ray spectrometers (WDS) face challenges in acquiring spectrum maps efficiently, as they can only analyze one energy value at a time, limiting their ability to easily produce spectrum maps compared to energy-dispersive X-ray spectrometers (EDS), which can measure all elements simultaneously.
Innovation Solution
An analyzing method and analyzer that utilize a wavelength-dispersive X-ray spectrometer with an electron optical system and a control unit to repeatedly perform mapping analysis while changing the position of the analyzing element, acquiring multiple map data sets and generating a spectrum map that associates positions on the specimen with X-ray spectra.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If wavelength-dispersive X-ray spectrometer performs mapping analysis to acquire map data, then measurement precision is improved, but productivity deteriorates due to inability to analyze multiple energies simultaneously
Solution Approach 1:
The patent divides the spectrum acquisition process into multiple mapping analysis steps, each targeting a specific energy range. By segmenting the full spectrum into multiple energy windows and acquiring map data for each segment separately, the system maintains high measurement precision while enabling comprehensive multi-element analysis through systematic data collection and synthesis.
Solution Approach 2:
The patent performs preliminary mapping analysis to acquire map data for multiple energy ranges before generating the final spectrum map. This preliminary action of collecting element distribution data across different energy windows enables subsequent reconstruction of complete X-ray spectra at each spatial position, resolving the contradiction between precise measurement and efficient productivity.
2Measurement precision
If wavelength-dispersive X-ray spectrometer performs point analysis to acquire spectrum map, then measurement precision is improved, but loss of time increases due to repeated analysis at each position
Solution Approach 1:
The patent segments the spectrum acquisition into multiple mapping analysis operations, each covering a specific energy range. By performing mapping analysis that scans the specimen while detecting X-rays at multiple energies simultaneously, the system avoids repeated point analysis at each position, thereby maintaining high measurement precision while significantly reducing total analysis time.
Solution Approach 2:
The patent performs preliminary mapping analysis to acquire element distribution data across multiple energy ranges before generating the final spectrum map. This preliminary collection of spatially-resolved spectral data eliminates the need for repeated point analysis, resolving the contradiction between precise measurement and time efficiency.
3Adaptability or versatility
If wavelength-dispersive X-ray spectrometer uses multiple analyzing elements, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent segments the spectral analysis into multiple energy ranges, with each analyzing element optimized for a specific energy window. This segmentation allows the system to achieve high adaptability for multi-element analysis by assigning specific elements to specific detectors, while the modular segmented structure actually reduces overall device complexity compared to attempting simultaneous full-spectrum detection with a single complex system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates the acquisition of spectrum maps using WDS, allowing for simultaneous analysis of multiple elements and reducing the time required for data collection compared to traditional point analysis methods, while also enabling corrections for spectrum shifts due to specimen displacement and electron beam deflection.
Implementation Method 1
a wavelength-dispersive X-ray spectrometer that has an analyzing element to analyze an X-ray emitted from a specimen and detects an X-ray of energy corresponding to a position of the analyzing element
Implementation Method 2
an electron optical system that irradiates a specimen with an electron beam
Data Source
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AI summary
An analyzing method using an analyzer including a wavelength-dispersive X-ray spectrometer (50a) that has an analyzing element (52) to analyze an X-ray emitted from a specimen (S) and detects an X-ray of energy corresponding to a position of the analyzing element (52), the analyzing method includes: acquiring a plurality of map data by repeatedly performing a mapping analysis while changing the position of the analyzing element (52), the mapping analysis being an analysis to detect an X-ray of specific energy with the position of the analyzing element (52) fixed to acquire map data while scanning the specimen with an electron beam (EB); and generating, based on the plurality of map data, a spectrum map (SM) in which a position on the specimen (S) and an X-ray spectrum are associated with each other.