Wedge Error Compensation Head for Imprinting Precision
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for wedge error compensation in micro-electronic, micro-optical, and micro-mechanical component production, such as passive and active wedge error compensation, face limitations in control displacement, particularly with piezo elements, which restrict the available displacement for the imprinting stroke due to limited constructional space and high tolerance requirements.
Innovation Solution
The method involves coarse-compensating for component tolerances using wedges, allowing only a small portion of the linear actuators' control displacement for fine wedge error compensation, thereby maximizing the remaining displacement for the imprinting stroke. This is achieved by positioning wedges to align the substrate and mask, followed by fine adjustment using piezo-element linear actuators, ensuring almost complete control displacement is available for the imprinting process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If piezo elements are used for linear actuators in active wedge error compensation, then manufacturing precision is improved, but control displacement is reduced due to limited constructional space
Solution Approach 1:
The patent divides the wedge error compensation into two independent stages: coarse compensation and fine compensation. The coarse compensation unit (with larger stroke) handles major alignment errors, while the fine compensation unit (piezo elements with small stroke) handles residual errors. This segmentation allows each unit to be optimized for its specific function without compromising the other.
Solution Approach 2:
The coarse compensation is performed before fine compensation. By preliminarily correcting the major wedge errors through coarse compensation, the subsequent fine compensation only needs to handle small residual errors, thereby maximizing the available control displacement of the piezo elements for the actual imprinting stroke.
2Manufacturing precision
If maximally available control displacements are used for tolerance compensation of system components, then manufacturing precision is improved, but the displacement available for imprinting stroke is reduced
Solution Approach 1:
The patent segments the compensation functions between coarse compensation unit and fine compensation unit. The coarse unit handles component tolerances and substrate wedge errors, while the fine unit handles residual errors. This ensures that the majority of displacement is consumed by coarse compensation, leaving maximum displacement for the imprinting stroke.
Solution Approach 2:
Tolerance compensation and wedge error compensation are performed as preliminary actions before the actual imprinting process. By completing these compensations in advance, the system ensures that the piezo elements' full control displacement range is available for the critical imprinting stroke.
3Device complexity
If passive wedge error compensation with brakes is used, then device complexity is reduced, but manufacturing precision is insufficient for advanced imprinting processes
Solution Approach 1:
The patent transitions from static passive compensation (fixed brakes) to dynamic active compensation. The active system uses measuring probes for real-time positioning reference and linear actuators for dynamic adjustment during the imprinting process, enabling precision compensation that adapts to actual conditions rather than relying on pre-set mechanical constraints.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively increases the control displacement available for wedge error compensation, allowing for more precise and efficient imprinting by reserving nearly the entire control displacement of the linear actuators for the imprinting stroke, enhancing the quality of the imprinting process.
Implementation Method 1
If piezo elements are used for the linear actuators, typically displacements of up to 80 μm can be compensated for
Implementation Method 2
the movable part of the wedge error compensating head is placed onto three linear actuators arranged in the reference plane
Data Source
AI summary
The invention relates to a method and device for expanding the travel or control displacement of linear actuators that is available during an imprinting or embossing stroke. The wedge error compensating head (2) comprises a movable part (4), a stationary part (3) and at least three linear actuators (8). Each linear actuator (8) is connected to one of the parts (3, 4) at one end and to the other of the two parts (4, 3) by wedges (9) at the other end. By means of the wedges (9), it is possible to coarsely or roughly compensate for wedge errors and possible tolerances of individual subcomponents of the system. The linear actuators (8) are only used for fine or precision compensation for the wedge error. In this way, sufficient control displacement is available for the imprinting stroke with the linear actuators.