Weighted MEMS Comb Structure for Extreme Camera Stabilization

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Solution Overview

Problem

Existing MEMS actuators struggle to effectively stabilize images during extreme camera movements due to insufficient mass and stability, leading to blurring in high-resolution cameras.

Innovation Solution

A MEMS structure with weighted comb-drive actuators featuring comb fingers made of a core material surrounded by a weighted core material with higher density, increasing the mass and inertia of the comb fingers to provide larger amplitude and more stable vibrations, thereby counteracting large vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional MEMS actuators are used, then the device complexity is low, but the mass and stability are insufficient leading to ineffective image stabilization during extreme movements

Engineering Contradiction:

Improveimage stabilization effectivenessVSAvoidmass of comb fingers

Core Design Contradiction:

ReliabilityVSWeight of moving object

Solution Approach 1:

The comb fingers are constructed using composite materials with a core material (e.g., polysilicon) and a weighted core material (e.g., tungsten, platinum, or gold) having higher density. This composite structure increases the mass and inertia of the comb fingers while maintaining structural integrity, enabling effective image stabilization during extreme camera movements.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The weighted core material is selectively positioned within the comb fingers at locations that maximize the moment of inertia and vibrational amplitude. This local enhancement of mass density in critical regions improves the actuator's ability to counteract vibrations without uniformly increasing the overall device mass.

Inventive Principle:

Principle #3Local quality

2Stability of the object's composition

If the mass of comb fingers is increased to improve stabilization, then the stability during extreme movements improves, but the manufacturing complexity increases

Engineering Contradiction:

Improvevibrational stabilityVSAvoidstructure complexity

Core Design Contradiction:

Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The weighted core material is nested within the core material of the comb fingers, forming a concentric or embedded structure. This nesting approach allows the heavy material to be contained within the existing actuator geometry, maintaining a compact form factor while increasing mass for improved vibrational stability.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The use of composite materials with distinct functional layers (core material for structural support, weighted core material for mass enhancement) allows systematic manufacturing through sequential deposition processes, managing complexity through modular material integration.

Inventive Principle:

Principle #40Composite materials

3Manufacturing precision

If conventional materials are used for comb fingers, then the manufacturing process is simple, but the vibrational amplitude is insufficient for high-resolution camera stabilization

Engineering Contradiction:

Improvestabilization precisionVSAvoidmass of comb fingers

Core Design Contradiction:

Manufacturing precisionVSWeight of moving object

Solution Approach 1:

The comb fingers incorporate a weighted core material with higher density (such as tungsten, platinum, or gold) surrounding or embedded within a core material like polysilicon. This composite structure increases the mass and inertia of the comb fingers, enabling larger vibrational amplitudes that are necessary for stabilizing high-resolution camera images during extreme movements.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The density parameter of the comb finger material is changed from conventional materials to high-density weighted materials. This parameter change directly increases the mass without significantly altering the geometric dimensions, thereby achieving the required vibrational amplitude for high-resolution image stabilization.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The weighted comb-drive actuators enhance image stabilization by providing larger amplitude and more stable vibrations, effectively mitigating blurring caused by extreme camera movements.

Implementation Method 1

increasing the mass and inertia of the comb fingers to provide larger amplitude and more stable vibrations

Methodology Applied

Scientific EffectInertia: Inertia

Implementation Method 2

comb fingers made of a core material surrounded by a weighted core material with higher density

Methodology Applied

Scientific EffectDensity: Density Gradient

Data Source

PatentUS20250330103A1Semiconductor MEMS structure and method for forming the same

Publication Date: 2025.10.23 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

The present disclosure, in some embodiments, relates to a MEMS (Microelectromechanical systems) structure. The MEMS structure includes a first comb structure having a first plurality of comb fingers extending outward from a first branch. A second comb structure has a second plurality of comb fingers extending outward from a second branch. The first plurality of comb fingers are laterally interleaved between the second plurality of comb fingers. The first plurality of comb fingers respectively include a weighted core material and one or more peripheral materials. The weighted core material has a larger density than the one or more peripheral materials.