Welded Bellows Double-Layer Design for Foreign Matter Damage
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Solution Overview
Problem
Welded metal bellows in semiconductor fabrication devices are prone to premature failure due to cyclic bending deformation caused by foreign matter infiltration, leading to reduced service life and compromised sealing performance.
Innovation Solution
A semiconductor fabrication device welded bellows with a double-layer structure, where the treatment-side bellows plate is thinner and designed for supple deformation, and the non-treatment-side bellows plate is thicker, acting as a sealing and reinforcing member, with a gas layer between them to absorb and reduce deformation stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single bellows plate is used, then the structure is simple and flexible, but it is prone to failure when foreign matter infiltrates causing cyclic bending deformation
Solution Approach 1:
The bellows plate is divided into two separate layers: a treatment-side bellows plate (thinner, more flexible) and a non-treatment-side bellows plate (thicker, more rigid). This segmentation allows each layer to perform its specific function - the treatment-side plate provides flexibility for sealing while the non-treatment-side plate provides structural support and resistance to deformation from foreign matter infiltration.
Solution Approach 2:
The invention uses a composite structure combining two bellows plates of different thicknesses and material properties. The treatment-side plate uses a thinner material for flexibility, while the non-treatment-side plate uses a thicker material for strength, creating a composite system that balances both flexibility and reliability.
2Ease of operation
If the bellows plate is made thinner for flexibility, then sealing performance improves, but resistance to cyclic bending deformation from foreign matter decreases
Solution Approach 1:
The bellows structure is segmented into two functional layers: the treatment-side bellows plate (thinner) provides sealing flexibility and conforms to foreign matter, while the non-treatment-side bellows plate (thicker) provides structural strength and resistance to cyclic bending deformation.
Solution Approach 2:
Different parts of the bellows structure have different thicknesses and properties tailored to their specific functions. The treatment-side plate is locally made thinner for flexibility and sealing contact, while the non-treatment-side plate is locally made thicker for structural support and deformation resistance.
3Strength
If a double-layer structure is used with both plates of uniform thickness, then structural strength improves, but flexibility and sealing performance are compromised
Solution Approach 1:
The bellows plates have non-uniform thickness distribution optimized for their specific functions. The treatment-side plate is thinner to maintain flexibility for sealing, while the non-treatment-side plate is thicker for structural strength, avoiding the compromise of uniform thickness design.
Solution Approach 2:
The double-layer structure is segmented with different thicknesses for different functions, allowing the system to achieve both strength and flexibility simultaneously rather than requiring uniform thickness throughout.
4Stress or pressure
If vent holes are added to the bellows plate for high pressure resistance, then pressure withstand capability improves, but sealing reliability decreases when foreign matter causes plate deformation
Solution Approach 1:
The bellows is segmented into two plates where the treatment-side plate maintains sealing integrity by conforming to foreign matter without vent holes, while the non-treatment-side plate provides structural support. This eliminates the need for vent holes that would compromise sealing.
Solution Approach 2:
The treatment-side bellows plate is designed as a thinner, more flexible component that can deform to accommodate foreign matter and maintain sealing, accepting that it may need replacement rather than using a more complex vented structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides redundancy and extended service life by allowing the non-treatment-side plate to compensate for damage to the treatment-side plate, preventing failure and maintaining sealing integrity despite foreign matter infiltration.
Implementation Method 1
a gas layer being disposed between the two plates
Implementation Method 2
the treatment-side bellows plate being of lesser thickness, and the non-treatment-side bellows plate being of greater thickness
Data Source
AI summary
A semiconductor fabrication device welded bellows of an accordion structure is characterized in that a plurality of annular bellows plates having faces curving in a radial direction are connected alternatingly at the outside diameter side and inside diameter side, wherein the annular bellows plates are provided with a treatment-side bellows plate and a non-treatment-side bellows plate, a gas layer disposed between the two bellows plates, the treatment-side bellows plate being of lesser thickness, and the non-treatment-side bellows plate being of greater thickness. The bellows are highly resistant to damage caused by foreign matter; or, in the unlikely case that the treatment-side bellows plate becomes damaged, the damage can be compensated for by the non-treatment side bellows plate.