Wet Bench Tank Layout for Byproduct Separation and Chemical Recycling
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Solution Overview
Problem
Existing semiconductor manufacturing processes face inefficiencies in wet chemical processing due to the accumulation of byproducts in the chemical liquid, which hinders the chemical reaction and increases operational costs.
Innovation Solution
A wet bench design featuring an outer and inner tank configuration with a sloped base plate and a recirculation system that separates and filters byproducts from the chemical liquid, allowing for efficient recycling and reduced chemical usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If wet chemical processing operations are used to fabricate integrated circuits, then cleaning, stripping, and etching operations can be performed, but byproducts accumulate in the chemical liquid which hinders chemical reaction and increases operational costs
Solution Approach 1:
The wet bench is divided into an inner tank and an outer tank, with the inner tank containing the chemical liquid and the outer tank collecting byproducts. This segmentation allows the chemical reaction zone to be separated from the byproduct accumulation zone, maintaining reaction efficiency while enabling continuous byproduct removal.
Solution Approach 2:
The system continuously removes byproducts from the chemical liquid through the outer tank and recycles the cleaned chemical liquid back into the inner tank. This discarding of harmful byproducts and recovery of usable chemical liquid resolves the contradiction by maintaining reaction efficiency while reducing chemical contamination and operational costs.
2Ease of operation
If chemical liquid is continuously used for wet chemical processing, then processing operations can be maintained, but byproduct accumulation increases operational costs
Solution Approach 1:
The wet bench enables continuous byproduct removal and chemical liquid recycling during processing operations. The outer tank continuously collects byproducts while the filtered chemical liquid is continuously recycled back to the inner tank, maintaining ease of operation while reducing chemical consumption and costs.
Solution Approach 2:
By continuously discarding byproducts through the outer tank and recovering cleaned chemical liquid for reuse, the system maintains continuous processing capability while minimizing chemical consumption and operational costs.
3Device complexity
If byproducts are allowed to accumulate in the chemical liquid, then simple processing can be maintained, but chemical reaction efficiency decreases
Solution Approach 1:
The wet bench uses a simple segmented design with an inner tank for chemical reactions and an outer tank for byproduct collection. This maintains processing system simplicity while effectively preventing byproduct accumulation, thereby preserving chemical reaction efficiency.
Solution Approach 2:
The system extracts byproducts from the chemical liquid through the outer tank, removing the harmful accumulation that would decrease reaction efficiency. This extraction mechanism maintains simplicity by using a straightforward tank configuration while effectively preserving productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively separates and recycles chemical liquid, maintaining reaction efficiency and reducing operational costs by minimizing byproduct accumulation and chemical consumption.
Implementation Method 1
separates and filters byproducts from the chemical liquid
Implementation Method 2
sloped base plate and a recirculation system that separates and filters byproducts
Data Source
AI summary
A method includes placing a wafer in an inner tank. The inner tank is surrounded by an outer tank having an inclined section extending from a first level to a second level lower than the first level along a sloped path, a vertical section extending from the second level to a third level lower than the second level along a vertical path, and a bottom section at the third level. The inner tank has a bottom section higher than the third level. A chemical liquid is introduced into the inner tank to trigger a chemical reaction with the wafer. Byproducts are produced during the chemical reaction. The inner tank is filled with the chemical liquid to a level above an upper edge of the inner tank, such that the chemical liquid and the byproducts overflow from the inner tank into the outer tank.