Wet Clean Chamber Rotor and Drain Layout for Splash Mitigation
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Solution Overview
Problem
Conventional wet clean chambers fail to adequately mitigate splashing during substrate cleaning, reducing efficiency and effectiveness.
Innovation Solution
The implementation of a wet clean chamber design featuring a rotatable substrate support with an upper fluid collection region and a stationary housing, including a lower fluid collection region and drain openings, to manage fluid flow and reduce splashing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional wet clean chambers are used, then substrate cleaning is performed, but splashing is not adequately mitigated
Solution Approach 1:
The fluid collection system is segmented into multiple regions: an upper fluid collection region with a first set of drain openings, and a lower fluid collection region with a second set of drain openings. This segmentation allows different portions of collected fluid to be drained through different pathways, effectively managing fluid flow and reducing splashing while maintaining cleaning efficiency
Solution Approach 2:
The rotor acts as an intermediary component between the substrate support and the fluid collection system. It rotates with the substrate support and provides the upper fluid collection region, mediating the interaction between the moving substrate and the stationary fluid collection infrastructure, thereby reducing splashing during rotation
2Reliability
If fluid is delivered to the substrate for cleaning, then cleaning effectiveness is achieved, but fluid splashing increases
Solution Approach 1:
The system converts the potentially harmful splashing effect into a beneficial fluid collection mechanism. The upper and lower fluid collection regions are positioned to capture fluid that would otherwise splash, and the drain openings channel this collected fluid in a controlled manner, transforming the harmful splashing into a useful fluid removal mechanism that enhances cleaning effectiveness
Solution Approach 2:
The fluid collection system extends in the vertical dimension with both upper and lower collection regions. This vertical dimensionality allows the system to capture fluid at different heights, preventing horizontal splashing while maintaining effective fluid delivery to the substrate for cleaning
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively minimizes splashing and enhances the efficiency and effectiveness of the cleaning process by managing fluid flow and collection.
Implementation Method 1
the rotor includes an upper fluid collection region disposed radially outward of the substrate support in position to collect fluid leaving the substrate support during processing
Implementation Method 2
a stationary housing surrounding the rotor and having a lower fluid collection region disposed beneath the drain openings of the rotor
Data Source
AI summary
Embodiments of wet clean chambers are provided herein. In some embodiments, a wet clean chamber includes: a deck plate; a substrate support that is rotatable and configured to support a substrate; a rotor disposed about and configured to rotate with the substrate support, wherein the rotor includes an upper fluid collection region disposed radially outward of the substrate support in position to collect fluid leaving the substrate support during processing, and wherein the upper fluid collection region includes a plurality of drain openings along a radially outward perimeter of a bottom of the upper fluid collection region; a stationary housing surrounding the rotor and having a lower fluid collection region disposed beneath the drain openings of the rotor; and one or more fluid delivery arms coupled to the deck plate and configured to deliver fluid to the substrate.