White Light LED Source for Lithography Wavelength Blocking
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Solution Overview
Problem
Existing lithography processes face challenges with yellow lighting environments, which cause operator fatigue, reduced workability and efficiency, and increased manufacturing costs due to the need for wavelength shielding films in fluorescent lamps used for semiconductor and PCB manufacturing, where light with wavelengths of 450 nm or less is required.
Innovation Solution
A white light illumination apparatus utilizing a blue light-emitting diode element with an encapsulation layer containing phosphors and a blocking agent, such as porphyrin-vanadium, to limit wavelengths of 450 nm or less, achieving white light emission while preventing light reaction with photoresists.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a white fluorescent lamp is used to provide white lighting in the exposure room, then the lighting quality is improved, but light with wavelength of 450 nm or less cannot be blocked without additional shielding films
Solution Approach 1:
The patent combines the lighting function and wavelength blocking function into a single integrated LED light source. The blue LED element with encapsulation layer containing phosphors and blocking agents simultaneously provides white lighting and blocks wavelengths of 450 nm or less, eliminating the need for separate shielding films and reducing device complexity.
Solution Approach 2:
The patent uses composite materials in the encapsulation layer, combining phosphors (for white light emission) and blocking agents (for wavelength filtering) within a single resin matrix. This composite structure enables the light source to perform both illumination and wavelength selection functions simultaneously.
2Reliability
If a wavelength shielding film is added to block light of 450 nm or less in fluorescent lamps, then the lithography process is protected, but manufacturing cost increases
Solution Approach 1:
The patent merges the wavelength blocking function into the LED light source itself through the encapsulation layer containing blocking agents. This integration eliminates the need for separate shielding films and reduces manufacturing steps, thereby lowering production costs while maintaining protection of the lithography process.
Solution Approach 2:
The patent extracts the wavelength blocking function from a separate component (shielding film) and integrates it into the light source structure. By incorporating blocking agents directly into the LED encapsulation layer, the design simplifies the overall system and reduces manufacturing complexity.
3Reliability
If yellow lighting is used in the exposure room to block wavelengths of 450 nm or less, then the lithography process is protected, but operator fatigue and workability deteriorate
Solution Approach 1:
The patent applies local quality by selectively blocking only the harmful wavelengths (450 nm or less) while allowing other wavelengths to pass through. The encapsulation layer with blocking agents creates a localized filtering effect that protects the lithography process without creating the overall yellow lighting environment that causes operator fatigue.
Solution Approach 2:
The patent changes the color characteristics of the emitted light by using phosphors and blocking agents in the encapsulation layer. Instead of producing yellow light, the system generates white light with a specific spectral distribution that blocks harmful wavelengths while maintaining good visibility and reducing operator fatigue.
4Reliability
If a fluorescent lamp with wavelength shielding film is used, then the lithography process is protected, but the lifespan is reduced due to emitter evaporation
Solution Approach 1:
The patent replaces the mechanical/electrical system of fluorescent lamps (which use high-voltage discharge and are prone to emitter evaporation) with an LED-based system. The LED light source with encapsulation layer provides equivalent wavelength blocking functionality without the high-voltage discharge mechanism, thereby eliminating the emitter evaporation problem and extending lifespan.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables white light emission within the required wavelength range, reducing operator fatigue, improving workability and visibility, and eliminating the need for additional shielding films, thereby lowering manufacturing costs.
Implementation Method 1
a blue light-emitting diode element having an emission peak wavelength of 450 nm to 490 nm
Implementation Method 2
one or more phosphors, which implement white light emission together with the blue light-emitting diode element
Implementation Method 3
a blocking agent, which blocks light of wavelength of 450 nm or less, are distributed in the encapsulation layer
Data Source
AI summary
The present invention relates to a white light source and illumination apparatus for limiting wavelength of 450 nm or less and, more particularly, to a white light source and illumination apparatus for lighting in a lithography or other process, capable of realizing white light even with the limited wavelength of 450 nm or less light. Disclosed is a white light illumination apparatus for limiting wavelength of 450 nm or less, the apparatus comprising a white light source comprising: a blue light-emitting diode element having an emission peak wavelength of 450-490 nm; and an encapsulation layer which encapsulates the blue light-emitting diode element, wherein in the encapsulation layer, one or more phosphors which realize white light emission along with the blue light-emitting diode element, and a blocking agent which blocks light of wavelength of 450 nm or less are scattered, thus forming a first peak region at a wavelength of 450-490 nm and a second peak region which realizes white light emission in combination with the first peak region and limiting the wavelength of 450 nm or less.