Automated Width Spacing Pattern Generation for IC Design

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Solution Overview

Problem

Current methods for generating track patterns in integrated circuits, especially at advanced nodes like 10 nm and below, are complex and require manual selection from precompiled libraries, lacking automation for non-BCB rule technologies, and fail to efficiently account for flipped or mirrored instances and complex color-based constraints.

Innovation Solution

The solution involves automatically generating width spacing patterns (WSPs) by examining instance heights, placement orientations, pin widths, spacing, and colors, along with techniques to fill gaps and account for flipped or mirrored instances, using EDA tools to create design rule correct track patterns that conform to fabrication process constraints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If manual selection from precompiled libraries is used to generate track patterns, then design rule compliance can be achieved, but the process complexity and time consumption increase significantly

Engineering Contradiction:
Improvedesign rule complianceVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system automatically generates width spacing patterns by examining instance characteristics and pin configurations itself, rather than requiring manual selection from precompiled libraries. The EDA tool performs self-service by computing valid WSPs based on instance data, eliminating the need for designer intervention in pattern selection.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system performs preliminary analysis of instance heights, placement orientations, and pin configurations before generating track patterns. By examining instance characteristics in advance and pre-computing valid WSPs, the system prepares all necessary information beforehand, streamlining the subsequent pattern generation process.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If precompiled libraries are used for track patterns, then design rule compliance is maintained, but large library sizes and storage requirements are needed

Engineering Contradiction:
Improvedesign rule complianceVSAvoidlibrary size
Core Design Contradiction:
Manufacturing precisionVSQuantity of substance

Solution Approach 1:

Instead of storing large precompiled libraries, the system creates patterns by copying and adapting instance characteristics. It generates WSPs by examining instance data and reproducing valid patterns dynamically, eliminating the need for extensive pre-stored pattern libraries while maintaining design rule compliance.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The system creates a universal pattern generation capability that can handle multiple instance types and configurations through a single automated process. Rather than requiring separate entries in precompiled libraries for different scenarios, the universal algorithm adapts to various instance characteristics and generates appropriate WSPs on-demand.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of manufacture

If traditional track pattern generation is used, then basic routing requirements are met, but flipped or mirrored instances are not properly accounted for

Engineering Contradiction:
Improverouting implementationVSAvoidinstance orientation handling
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The system explicitly accounts for asymmetric instance orientations including flipped and mirrored configurations. By examining placement orientations and adjusting WSP generation accordingly, the system handles asymmetric cases that traditional symmetric approaches would miss, ensuring reliable routing for all instance variations.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The system uses feedback from instance characteristics (heights, orientations, pin configurations) to dynamically adjust track pattern generation. By continuously examining instance data and adapting WSPs based on this feedback, the system ensures proper handling of flipped or mirrored instances while maintaining routing effectiveness.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS10733351B1Generating width spacing patterns for multiple patterning processes using instances
Publication Date: 2020.08.04 CADENCE DESIGN SYST INC
  • US10733351B1 patent drawing
  • US10733351B1 patent drawing
  • US10733351B1 patent drawing

AI summary

Embodiments according to the present disclosure relate to physically implementing an integrated circuit design while conforming to the requirements of complex color based track systems, and using information about instances that have been included in the design. In particular, the present embodiments allow for the automatic creation of WSPs by examining heights and placement orientations of instances, along with the width, spacing, and colors of instance pins and blockages. In these and other embodiments, techniques are provided for filling gaps between generated tracks, as well as for generating tracks to account for the possibility of flipped or mirrored instances.