Process Chamber Window Cooling via Slot Distribution
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Solution Overview
Problem
Process chamber windows overheating due to light absorption and energy conversion, leading to excessive temperatures that can inadvertently heat wafers beyond intended levels.
Innovation Solution
A cooling apparatus with a support ring and slots to deliver gas or airflow across the window, combined with anti-reflective coatings to enhance light transmission and reduce energy loss, and a high-pressure blower for uniform airflow distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If the window is used to transmit light from the lamp array without cooling, then light transmission is maintained, but the window temperature increases excessively and radiates energy into the wafer
Solution Approach 1:
A cooling gas (such as nitrogen or air) is introduced as an intermediary substance between the window and the wafer. The gas flows across the window surface through slots in the support ring, absorbing heat from the window and preventing thermal radiation to the wafer, thus mediating the thermal interaction while maintaining optical transmission
Solution Approach 2:
The invention employs pneumatic cooling by delivering a gas flow across the window surface. The gas is supplied through a main duct to the support ring, which distributes it through multiple slots. This pneumatic system effectively removes heat from the window without compromising its optical function
2Loss of energy
If anti-reflective coatings are applied to the window, then light transmission is enhanced and energy loss is reduced, but the manufacturing complexity increases
Solution Approach 1:
Anti-reflective coatings are applied to the window surface to modify its optical properties. These coatings reduce reflection and enhance light transmission by creating optical interference effects, thereby minimizing energy loss. Although the coating process adds manufacturing steps, it significantly improves energy efficiency and is a standard industrial process
3Temperature
If a cooling apparatus with slots in the support ring is used, then window cooling is achieved, but the device complexity increases
Solution Approach 1:
The cooling apparatus is segmented into distinct functional components: a main duct for gas supply, a support ring with multiple slots for gas distribution, and the window assembly. This segmentation allows each component to perform its specific function efficiently and facilitates easier manufacturing, assembly, and maintenance of the overall system
Solution Approach 2:
The support ring serves multiple functions: it provides mechanical support for the window, acts as a gas distribution manifold through its slots, and helps position the window within the process chamber. This multi-functionality reduces the need for additional separate components, thereby managing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively reduces window temperature, maintains wafer temperature control, and lowers operating costs by improving throughput and reducing energy consumption.
Implementation Method 1
a cooling apparatus operable with the process chamber, the cooling apparatus for delivering a gas to the window
Implementation Method 2
The window absorbs some of the light and converts light energy into temperature increase in the window
Data Source
AI summary
Provided herein are approaches for cooling a process chamber window. In some embodiments, a system for process chamber window cooling may include a process chamber for processing a wafer, wherein the process chamber includes a window. In some embodiments, the window allows light from a lamp assembly to be delivered to the wafer. The system further includes a cooling apparatus operable with the process chamber, the cooling apparatus for delivering a gas to the window. The cooling apparatus includes a support ring supporting the window. The support ring includes a perimeter wall, and a plurality of slots formed through the perimeter wall. The plurality of slots may deliver a gas (e.g., air) across the window.