Wing-Shaped Support Members for Semiconductor Probe Tips
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Solution Overview
Problem
Semiconductor device probes face challenges in maintaining rigidity and durability, especially when testing smaller transistor geometries, leading to reduced lifespan and slower testing speeds due to deformity under applied forces.
Innovation Solution
The implementation of wing-shaped support members on semiconductor device probes, specifically formed on the tip between the base and the pointed end, increases the rigidity of the probe tip, allowing it to resist deformity and maintain precision contact with semiconductor devices without interfering with automated vision control systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the probe tip is made smaller to test smaller transistor geometries, then the measurement precision is improved, but the rigidity of the tip deteriorates, causing deformity under applied forces
Solution Approach 1:
The support member extends radially outward from the probe tip in a direction perpendicular to the longitudinal axis, adding structural support in a different dimensional orientation. This radial extension provides stiffness to resist bending forces while maintaining a small tip diameter for precision testing of smaller transistor geometries.
Solution Approach 2:
The support member is formed from a material that is mechanically coupled to the probe tip, creating a composite structure where the support member reinforces the tip. This composite construction allows the tip to maintain both small dimensions for precision and enhanced rigidity for resisting applied forces during testing.
2Adaptability or versatility
If the probe tip is made smaller to increase integration capability, then the adaptability is improved, but the duration of action deteriorates due to reduced lifespan from deformity
Solution Approach 1:
By adding support structure in the radial dimension rather than increasing the longitudinal length of the tip, the probe maintains its ability to test smaller transistor geometries while gaining the structural strength needed for prolonged use without deformity-induced failure.
Solution Approach 2:
The reinforced composite structure extends the probe's operational life by preventing deformity that would lead to failure, while preserving the small tip size required for testing highly integrated semiconductor devices with smaller transistor geometries.
3Strength
If support members are added to increase rigidity, then the strength is improved, but the device complexity increases
Solution Approach 1:
The support member is configured as a simple radial extension from the tip, adding strength through a straightforward geometric addition rather than a complex multi-component structure. This minimalistic approach increases rigidity while keeping the overall device complexity low.
Solution Approach 2:
The support member is formed as an integral part of the probe tip structure, creating a composite that strengthens the tip without requiring separate assembly steps or multiple discrete components, thus minimizing the increase in device complexity.
4Measurement precision
If the pointed end is made smaller for better access, then the measurement precision is improved, but the resistance to deformity deteriorates
Solution Approach 1:
The support member provides structural reinforcement in the radial dimension, creating a stiffening effect that protects the small pointed end from deformity while preserving its small size for accessing and contacting small semiconductor features with precision.
Data Source
AI summary
Example wing-shaped support members for enhancing semiconductor device probes and methods to form the same are disclosed. A disclosed example semiconductor device probe includes a finger having a first end and a second end. The example probe further includes a tip having a base and a pointed end. The base is joined to the first end of the finger and the tip tapers from the base to the pointed end. The probe also includes a support member on the tip to increase a rigidity of the tip.