Wire Grid Polarizer Plate Composite Partition Walls
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Solution Overview
Problem
Existing wire grid polarizer technologies face limitations in achieving high polarization, transmittance, and brightness gain while maintaining processability in manufacturing.
Innovation Solution
A wire grid polarizer plate design featuring a transparent substrate with first, second, and third partition walls made of different metals and their oxides, respectively, where the third reinforced partition walls have a stepped cross-sectional structure, formed through a continuous deposition process to enhance polarization and transmittance, and a manufacturing method that includes forming these layers using physical vapor deposition and heat treatment to improve etch profile and process efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a simple single-layer wire grid structure is used, then the manufacturing process is simple, but the polarization degree, transmittance, and brightness gain are insufficient
Solution Approach 1:
The partition wall is constructed as a composite structure with three distinct layers: a first partition wall made of first metal, a second partition wall made of second metal with greater strength, and a third reinforced partition wall made of oxide of the first metal with even greater strength. This composite structure achieves high polarization degree and brightness gain while maintaining manufacturing feasibility through continuous deposition processes.
Solution Approach 2:
The partition wall structure extends in the vertical dimension with a stepped cross-sectional structure, creating multiple levels of reinforcement. This dimensional approach allows the structure to achieve enhanced mechanical strength and optical performance without significantly increasing lateral complexity.
2Reliability
If a multi-layer reinforced partition wall structure is used to improve polarization and transmittance, then the optical performance improves, but the manufacturing process becomes more complex
Solution Approach 1:
The manufacturing process merges multiple deposition steps into a single continuous deposition process. The first material layer (first metal), second material layer (second metal), and third material layer (oxide of first metal) are formed continuously without breaking the vacuum or stopping the deposition, thereby simplifying the overall manufacturing process despite the multi-layer structure.
Solution Approach 2:
The continuous deposition process maintains uninterrupted formation of the partition wall layers, ensuring consistent material properties and interface quality. This continuity eliminates potential defects that would arise from stopping and restarting deposition, thereby maintaining ease of manufacture while achieving high transmittance.
3Strength
If the partition wall material strength is increased to improve structural integrity, then the mechanical strength improves, but the etching resistance and processability may deteriorate
Solution Approach 1:
Different layers of the partition wall are assigned different material properties tailored to their specific functions: the first metal layer provides base structural support, the second metal layer (with greater strength) enhances mechanical integrity, and the third oxide layer (with even greater strength) provides surface reinforcement and etching resistance. Each layer's local quality is optimized for its specific role in the overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high polarization, transmittance, and brightness gain, while simplifying the manufacturing process by using a continuous deposition method and heat treatment to enhance the etching resistance and structural integrity of the partition walls.
Implementation Method 1
forming a first material layer including a first metal, on a transparent substrate; forming on the first material layer, a second material layer including a second metal; forming on the second material layer, a third material layer including an oxide of the first metal
Implementation Method 2
forming from the third partition walls, a third reinforced partition wall provided in plural and including the oxide of the first metal, the third reinforcing partition walls having strength greater than the strength of the second metal and having a stepped cross-sectional structure by heat treatment of the third partition walls
Implementation Method 3
a partition wall member which protrudes from the transparent substrate and at which, among the incident light transmitted through the transparent substrate, first polarized light is transmitted and second polarized light perpendicular to the first polarized light is reflected
Data Source
AI summary
A wire grid polarizer plate includes: a transparent substrate through which incident light is transmitted; and a partition wall member on the transparent substrate and at which first polarized light is transmitted and second polarized light perpendicular to the first polarized light is reflected. The partition wall member is defined by: first partition walls spaced apart from each other on the transparent substrate, the first partition walls formed of a first metal; second partition walls respectively on the first partition walls, the second partition walls formed of a second metal having strength greater than that of the first metal; and third reinforced partition walls respectively on the second partition walls and having a stepped cross-sectional structure, the third partition walls formed of an oxide of the first metal, the oxide of the first metal having strength greater than the strength of the second metal.