Wire Grid Polarizer Protected Wires Vapor Deposition
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Solution Overview
Problem
Wire grid polarizers are prone to damage from handling and corrosion due to water condensation, which can lead to degraded performance and reduced contrast in applications such as computer projectors and semiconductor inspection tools.
Innovation Solution
A wire grid polarizer design featuring an array of wires on a substrate with air-filled channels, protected by a protective layer applied via physical or chemical vapor deposition, and additional coatings to prevent corrosion and structural damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If wire grid polarizer uses nanometer-sized wires with small pitch for high performance polarization, then polarization effectiveness is improved, but wire structural strength deteriorates making wires vulnerable to damage from water condensation and handling
Solution Approach 1:
The patent applies the nesting principle by placing a protective layer inside the air-filled channels where water would condense, creating a nested structure that protects the delicate wires without interfering with their polarization function. The protective layer is positioned within the channel space, effectively shielding wires from water contact while maintaining the nanometer-scale wire dimensions needed for high polarization effectiveness.
Solution Approach 2:
The protective layer serves as an intermediary element between the external environment (water vapor) and the delicate wire structure. This intermediary prevents direct contact between condensing water and the wires, eliminating the mechanical stress that would otherwise cause wire damage while allowing the wires to maintain their fragile nanometer dimensions for optimal polarization performance.
2Ease of manufacture
If wire grid polarizer has open air-filled channels for structural design, then manufacturing and light interaction are improved, but water condensation can wick into channels causing corrosion
Solution Approach 1:
The patent converts the harmful effect of water condensation into a beneficial protective mechanism by applying a hydrophobic coating to the protective layer. This coating causes water to bead up and roll off rather than wick into the channels, transforming the potential corrosion hazard into a protective feature that actually prevents water contact with the wires while maintaining open channel architecture.
Solution Approach 2:
The protective layer functions as a thin film barrier that lines the air-filled channels, providing corrosion protection while maintaining the open channel structure. This thin film approach preserves the manufacturing advantages of open channels for light interaction and structural design, while the coating on the protective layer provides the necessary water resistance to prevent corrosion.
3Duration of action of stationary object
If protective layer is applied to cover air-filled channels for wire protection, then wire durability is improved, but optical performance may be affected
Solution Approach 1:
The patent applies local quality by making the protective layer selectively transparent to different polarizations. The protective layer is designed with specific optical properties that allow it to be locally transparent to p-polarized light (maintaining high transmission) while being reflective or absorptive to s-polarized light (maintaining low transmission). This localized optical property differentiation ensures wire protection without compromising overall polarizer performance.
Solution Approach 2:
The patent utilizes parameter changes by carefully controlling the thickness, material composition, and optical constants of the protective layer. By adjusting these parameters, the protective layer can be optimized to have minimal impact on p-polarized light transmission while providing sufficient mechanical protection. The layer's optical parameters are tuned to match the surrounding media, reducing interference effects and maintaining high polarization contrast.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The protective measures enhance the durability and performance of wire grid polarizers by preventing water ingress and physical damage, maintaining high contrast and reflection ratios essential for accurate polarization.
Implementation Method 1
applying a protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires and spanning the air-filled channels
Implementation Method 2
applying a protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires and spanning the air-filled channels
Implementation Method 3
Water can condense onto the wire grid polarizer and wick into narrow channels between wires due to capillary action
Data Source
AI summary
A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.