Wireless AC Power Control for Synchronized Motor Drive Reception
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Solution Overview
Problem
Existing wireless power transmission systems for motor drivers in semiconductor exposure apparatuses require a large-sized coarse motion stage due to the need for a motor driver on the power reception side, which increases the scale of the control system and complicates the supply of suitable alternating-current (AC) power to the load.
Innovation Solution
A control system that includes a power transmission unit for wirelessly transmitting alternating-current power and a power reception unit capable of receiving and rectifying the power, using a switching circuit and rectifying circuit with bidirectional switches to efficiently transmit and restore AC power to the load, while minimizing the size of the power reception unit by selecting the appropriate clock signal based on detected power levels to maintain synchronization and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a motor driver is disposed on the power reception side of wireless power transmission to generate alternating voltage for the motor, then the motor can be driven wirelessly, but the coarse motion stage becomes large-sized and the control system scale increases
Solution Approach 1:
The motor driver is extracted from the power reception side (coarse motion stage) and relocated to the power transmission side. The power transmission unit now includes the motor driver that generates alternating voltage, which is then wirelessly transmitted to drive the motor. This extraction removes the bulky motor driver from the moving coarse motion stage, significantly reducing its volume while maintaining wireless power transmission functionality.
Solution Approach 2:
The conventional configuration is inverted: instead of having the motor driver on the power reception side (coarse motion stage) to generate AC voltage locally, the system inverts this by placing the motor driver on the power transmission side. The power transmission unit generates the alternating voltage and transmits it wirelessly to the power reception unit, which only needs to receive and rectify the power, not generate AC voltage.
2Adaptability or versatility
If a large-sized coarse motion stage is used to accommodate the motor driver, then wireless power transmission can be implemented, but the scale of the control system increases and complicates power supply
Solution Approach 1:
The motor driver is extracted from the coarse motion stage and placed on the power transmission side. This extraction simplifies the control system architecture by consolidating the AC voltage generation function in the stationary power transmission unit, while the moving coarse motion stage only requires simple power reception and rectification functions, reducing overall system complexity.
Solution Approach 2:
The system inverts the conventional arrangement by placing the complex motor driver on the stationary power transmission side rather than on the moving power reception side. This inversion simplifies the control system by keeping the complex AC voltage generation and control circuitry stationary, while the moving stage only handles simple power reception, making the overall system easier to control and manage.
3Volume of moving object
If the power reception unit is minimized in size, then the coarse motion stage volume is reduced, but it becomes challenging to maintain synchronization and accuracy in power reception
Solution Approach 1:
A clock signal transmission mechanism is introduced as an intermediary to maintain synchronization between the power transmission and reception units. The power transmission unit transmits a clock signal along with the power, and the power reception unit uses this clock signal to synchronize its rectification operations. This intermediary clock signal ensures that even with a minimized power reception unit, synchronization and measurement precision are maintained accurately.
Solution Approach 2:
The system implements feedback through the clock signal mechanism, where the power transmission unit sends timing information to the power reception unit. The power reception unit uses this feedback clock signal to adjust its rectification timing, ensuring synchronized operation with the power transmission unit. This feedback loop maintains synchronization accuracy despite the reduced size of the power reception unit.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces the size of the power reception unit, ensures high-accuracy alternating voltage supply to the motor, and prevents clock signal errors due to electromagnetic interference, enabling efficient wireless power transmission and maintaining synchronization between the switching and rectifying circuits.
Implementation Method 1
a power transmission unit configured to wirelessly transmit alternating-current power, and a power reception unit configured to receive the alternating-current power wirelessly transmitted from the power transmission unit
Implementation Method 2
a first switching unit configured to switch the alternating-current power at a timing based on a first clock signal and wirelessly transmit the switched alternating-current power
Implementation Method 3
a first rectifying unit configured to switch the alternating-current power wirelessly transmitted by the first switching unit at a timing based on the clock signal selected by the first clock selection unit
Data Source
AI summary
A power transmission unit includes a switching unit configured to switch alternating-current (AC) power at a timing based on a first clock signal and wirelessly transmit the switched AC power, and a clock transmission unit configured to wirelessly transmit the first clock signal. A power reception unit includes a clock reception unit configured to receive the first clock signal, a detection unit configured to detect an amount of electric power and a switching timing of the AC power, a clock generation unit configured to generate a second clock signal based on the switching timing, a clock selection unit configured to select the first or second clock signal in accordance with the amount of electric power, and a rectifying unit configured to switch the AC power wirelessly transmitted by the switching unit at a timing based on the clock signal selected.