Wireless Capacitive Sensor for Platen Showerhead Parallelism
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Solution Overview
Problem
Existing semiconductor processing tools face challenges in accurately measuring and adjusting the parallelism and distance between the platen and showerhead, relying on cumbersome cable-based systems prone to failure and requiring manual judgment for precise adjustments.
Innovation Solution
A wireless capacitive sensor system with internal power and wireless communication, using capacitive plates to measure distance and parallelism, eliminating the need for cables and enabling precise, automatic adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cable-based measurement device is used to measure distance and parallelism, then measurement capability is provided, but the cable is prone to failure due to compression in the door seal and requires manual monitoring of multiple measurements
Solution Approach 1:
The patent extracts the measurement capability from the cable-based system and integrates it into a wireless sensor node that can independently measure and transmit data. The sensor node contains capacitive sensing elements, power source, and wireless transceiver, eliminating the need for cables while maintaining measurement functionality.
Solution Approach 2:
The patent replaces the mechanical cable-based data transmission system with a wireless electromagnetic communication system. The sensor node uses a wireless transceiver to transmit measurement data and status information to external devices, eliminating the physical cable that was prone to failure in the door seal compression zone.
2Ease of operation
If a measurement device with compressible springs is used, then distance measurement is enabled, but the device must be compressed before placement or the showerhead must be removed
Solution Approach 1:
The patent incorporates preliminary action by pre-compressing the measurement device during manufacturing or before use. The device is designed with a compressed spring mechanism that is already in a pre-loaded state, allowing immediate placement between the platen and showerhead without requiring additional compression steps or showerhead removal.
Solution Approach 2:
The patent employs a dynamically adjustable measurement device with compressible elements that can adapt to different spacing requirements. The spring-based mechanism allows the device to compress and expand as needed, providing flexibility in installation and adjustment while maintaining measurement accuracy across varying distances.
3Measurement precision
If multiple individual distance measurements are taken at different points, then parallelism assessment is possible, but technicians must manually monitor 3-8 measurements and use judgment to determine adequacy
Solution Approach 1:
The patent merges multiple capacitive sensing elements into a single integrated sensor node array. Each sensor node measures distance at its specific location, and the collective data from multiple nodes provides comprehensive parallelism assessment. The system combines individual measurements into unified parallelism and orientation calculations, eliminating the need for manual monitoring of separate measurements.
Solution Approach 2:
The patent implements feedback by providing real-time wireless transmission of measurement data and automatic calculation of parallelism metrics. The system processes multiple distance measurements, computes parallelism deviations, and provides feedback to technicians or control systems, enabling automatic or assisted adjustment without relying on manual judgment of multiple individual readings.
4Strength
If the measurement device profile is larger than the nominal distance between platen and showerhead, then the device structure is robust, but it requires compression before placement or showerhead removal
Solution Approach 1:
The patent applies the nested doll principle by designing a measurement device with a telescopic or collapsible structure. The sensor housing and measurement elements can be compressed into a compact form factor that fits within the nominal distance between platen and showerhead, while maintaining structural integrity. The device can be inserted in its compressed state and then expanded to its full measurement capability once in position.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate, wireless measurement and adjustment of distance and parallelism between the platen and showerhead, improving setup efficiency and reducing technician reliance on manual judgments.
Implementation Method 1
capacitance is sensed as an indication of a distance between two objects... a capacitive plate that forms a capacitor with another conductive object, the capacitance of which varies as a function of the distance between the plate and the object
Data Source
AI summary
A wireless sensor includes at least one capacitive plate for sensing a distance relative to an object of interest within a semiconductor-processing environment. The sensor includes an internal power source and wireless communication such that distance and/or parallelism measurements effected using the capacitive plate(s) can be provided wirelessly to an external device.