Wireless Chamber Sensor With RF Power for Continuous Monitoring

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Solution Overview

Problem

Existing chamber monitoring solutions require frequent venting for battery recharge, leading to downtime and limited duration of operation, and provide only snapshot data without real-time monitoring capabilities.

Innovation Solution

A wireless sensor system with a sealed cavity housing a rechargeable battery powered by RF power delivery, allowing continuous operation and real-time monitoring through integrated sensors and data transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a battery-powered sensor is used in the chamber, then the sensor can operate wirelessly, but the battery requires frequent venting for recharging which causes downtime

Engineering Contradiction:

Improvewireless operationVSAvoiddowntime for battery recharging

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The patent replaces the mechanical battery recharging system with a wireless electromagnetic energy transfer system. An external antenna transmits RF energy through the chamber wall to power the sensor continuously without requiring chamber venting or physical battery replacement, thereby eliminating downtime.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The wireless power transfer system enables continuous operation of the sensor throughout the entire chamber cycle including during plasma processing. The sensor receives power continuously via RF energy coupling through the chamber wall, eliminating interruptions for battery recharging and maintaining uninterrupted monitoring.

Inventive Principle:

Principle #20Continuity of useful action

2Ease of operation

If a battery-powered sensor is used, then wireless monitoring is enabled, but the operation duration is limited by battery capacity

Engineering Contradiction:

Improvewireless monitoring capabilityVSAvoidoperation duration

Core Design Contradiction:

Ease of operationVSDuration of action of moving object

Solution Approach 1:

The patent replaces the finite-capacity battery system with an external wireless power supply system. The sensor is powered continuously through RF energy transfer from an external source, eliminating the operational duration limit imposed by battery capacity and enabling indefinite monitoring.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If process monitoring sensors are deployed within the chamber, then real-time monitoring is achieved, but the chamber must be vented frequently for sensor maintenance

Engineering Contradiction:

Improveprocess monitoring capabilityVSAvoidthroughput

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The patent replaces wired sensor connections and physical maintenance access with wireless power and data transmission through RF energy coupling. This eliminates the need to vent the chamber for sensor maintenance, allowing continuous real-time monitoring without interrupting the vacuum process and thereby maintaining high productivity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Measurement precision

If sensors are exposed to plasma environment, then in-situ monitoring is achieved, but the harsh environment limits sensor longevity

Engineering Contradiction:

Improvein-situ monitoring capabilityVSAvoidsensor longevity

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent introduces an intermediary protective structure that allows the sensor to monitor the plasma environment indirectly without direct exposure. The sensor is positioned to detect plasma parameters through the chamber wall or protective barrier, maintaining measurement capability while shielding the sensor from harsh plasma conditions that would otherwise degrade it.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables prolonged chamber monitoring without downtime, supports multiple sensors, and facilitates real-time data transmission, enhancing processing uniformity and throughput by continuously powering sensors within harsh plasma environments.

Implementation Method 1

A wireless sensor system with a sealed cavity housing a rechargeable battery powered by RF power delivery

Methodology Applied

Scientific EffectRF power delivery: Electromagnetic Induction

Data Source

PatentUS20250336638A1Wireless chamber sensor

Publication Date: 2025.10.30 APPLIED MATERIALS INC

AI summary

Embodiments disclosed herein relate to an apparatus that includes a housing with a cavity, and a cover with a first surface and a second surface. In an embodiment, the cover is coupled to the housing with the second surface facing the housing. In an embodiment, a sensor is on the first surface of the cover, and a battery is electrically coupled to the sensor. In an embodiment, the battery is within the cavity.