Switchable Wireless Power Coil Array for Low-Interference Motion Stages

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Solution Overview

Problem

The existing wireless power transmission systems for movable units, such as semiconductor exposure apparatuses, suffer from increased footprint and power interference due to the use of multiple power transmission apparatuses and cables, which affect positioning accuracy.

Innovation Solution

A wireless power transmission system with a power transmission coil array and switchable connections between power transmission and reception coils, allowing shared use of coils and reducing interference by synchronized rectification and phase-shifted switching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple power transmission apparatuses are used to wirelessly power multiple motors, then wireless power transmission is achieved, but the footprint of the system increases

Engineering Contradiction:

Improvewireless power transmission capabilityVSAvoidsystem footprint

Core Design Contradiction:

Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

Multiple power transmission coils are arranged in an array and share common impedance adjustment means, allowing them to be controlled as a unified system rather than separate apparatuses. This merging reduces the overall footprint while maintaining the ability to wirelessly power multiple motors independently

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The impedance adjustment means serves multiple power transmission coils simultaneously, making it a universal component that performs the same function for multiple coils. This multi-functionality reduces the number of separate components needed, thereby reducing system footprint

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Area of stationary object

If multiple power transmission apparatuses are juxtaposed to reduce footprint, then space is saved, but power interference occurs between apparatuses

Engineering Contradiction:

Improvesystem footprintVSAvoidpower interference

Core Design Contradiction:

Area of stationary objectVSObject-generated harmful factors

Solution Approach 1:

Each power transmission coil can have its impedance independently adjusted through the shared impedance adjustment means, allowing local optimization of each coil's performance. This enables coils to be positioned closer together without excessive interference, as each coil's electromagnetic characteristics can be tuned to minimize interaction with adjacent coils

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The impedance of each power transmission coil is made variable through the impedance adjustment means, allowing the system to change operating parameters dynamically. By adjusting impedance, the system can optimize power transmission efficiency while minimizing interference between closely-spaced coils

Inventive Principle:

Principle #35Parameter changes

3Reliability

If cables are used to connect drivers and motors on the stage, then reliable power delivery is achieved, but positioning accuracy drops due to cable tension

Engineering Contradiction:

Improvepower delivery reliabilityVSAvoidpositioning accuracy

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The mechanical cable connection system is replaced with a wireless electromagnetic power transmission system. Power transmission coils generate electromagnetic fields that inductively couple with power reception coils on the stage, eliminating the need for physical cable connections and the associated mechanical constraints that degrade positioning accuracy

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces the system footprint and minimizes power interference, maintaining accurate positioning and efficient power delivery to motors.

Implementation Method 1

a plurality of power transmission coils 301 to 312 configured to wirelessly transmit the first power or the second power

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

a power reception coil 401 configured to be movable relative to the plurality of power transmission coils 301 to 312 and wirelessly receive the first power from one of the power transmission coils

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS12525824B2Wireless power transmission system and method for controlling wireless power transmission system

Publication Date: 2026.01.13 CANON KK

AI summary

A wireless power transmission system includes a first power transmission circuit configured to output first power to be transmitted, a second power transmission circuit configured to output second power to be transmitted, a plurality of power transmission coils, a first power reception coil configured to be movable relative to the plurality of power transmission coils and wirelessly receive the first power from one of the power transmission coils, a second power reception coil configured to be movable relative to the plurality of power transmission coils and wirelessly receive the second power from one of the power transmission coils, and a first switch configured to connect a power transmission coil opposed to the first power reception coil among the plurality of power transmission coils to the first power transmission circuit, and connect a power transmission coil opposed to the second power reception coil to the second power transmission circuit.