Wireless Level Sensor Module for Narrow-Space Flatness Inspection
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Solution Overview
Problem
Existing semiconductor manufacturing facilities face challenges in accurately measuring and monitoring equipment flatness due to limitations in current analog and digital inclination sensors, which are prone to errors in narrow spaces and heavy, causing potential substrate damage and temperature imbalances.
Innovation Solution
A level sensor module wirelessly connected to a portable terminal, comprising a sensor unit, wireless communication unit, battery unit, charging unit, and control unit, allowing remote monitoring and inspection of inclination measurements, with a portable terminal for data display and abnormality checking.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If digital sensors with integral display are used, then digitization and ease of use are improved, but weight increases and device complexity increases making them difficult to use in narrow spaces
Solution Approach 1:
The measurement system is divided into two separate components: a lightweight sensor module for measurement and a portable terminal for display and processing. This segmentation allows the sensor to be small and lightweight for narrow spaces, while the display functions remain accessible through the terminal.
Solution Approach 2:
The display function is extracted from the sensor module and placed in the portable terminal. This extraction eliminates the need for a heavy integral display in the sensor, reducing weight while maintaining ease of use through the terminal's display capabilities.
2Measurement precision
If digital sensors with integral display are used, then digitization is improved, but device complexity increases making them difficult to use in narrow spaces
Solution Approach 1:
The system is segmented into a simple sensor module for precise measurement and a portable terminal for complex data processing and display. This allows high measurement precision without concentrating all complexity in the sensor, making the overall system more manageable in narrow spaces.
Solution Approach 2:
The portable terminal acts as an intermediary between the sensor module and the user. It handles the complexity of data processing, display, and user interaction, while the sensor module remains relatively simple, reducing overall device complexity in the measurement component.
3Ease of operation
If analog inclination sensors are used, then ease of operation is improved, but measurement precision deteriorates due to user gaze errors
Solution Approach 1:
The mechanical bubble indication system is replaced with a digital sensor that provides electronic data output. This substitution eliminates subjective interpretation errors while maintaining ease of operation through simple attachment and automatic digital reading via the portable terminal.
Solution Approach 2:
The portable terminal serves as an intermediary that displays precise digital measurements, eliminating the need for direct visual inspection of bubbles. This intermediary provides objective, precise readings while keeping the sensor itself simple to operate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and accurate remote monitoring and inspection of equipment flatness, reducing errors and ensuring consistent measurement quality in challenging environments.
Implementation Method 1
a sensor unit configured to measure an inclination
Implementation Method 2
a wireless communication unit configured to transmit a measured value of the sensor unit
Implementation Method 3
a battery unit configured to supply a power source to the sensor unit and the wireless communication unit
Implementation Method 4
a charging unit configured to provide a charging power from the portable terminal to charge the battery unit
Data Source
AI summary
The inventive concept provides a portable level measuring apparatus. The portable level measuring apparatus includes a sensor module having a sensor unit configured to measure an inclination of a measuring object and a wireless communication unit configured to transmit a measured information which is measured at the sensor unit; and a portable terminal connected to the sensor module through a wireless communication, and which displays the measured information, and wherein the sensor module combines with the portable terminal through a connector and which pairs immediately if separated with the portable terminal.