Passive Wireless MEMS Resonator Assembly for Precise Backscatter Sensing

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Solution Overview

Problem

Existing passive wireless electronic components, such as LC resonant circuit sensors and electromagnetic transduction sensors, face limitations in reading distance, precision, and environmental sensitivity, particularly due to the impact of external conditions on antenna resonance frequencies, leading to inaccurate measurements of physical quantities like temperature and pressure.

Innovation Solution

A passive wireless electronic component comprising multiple microelectromechanical systems (MEMS) resonators with disjoint resonance frequency ranges, each connected to an antenna, allowing for precise measurement of distinct physical quantities by differentiating responses to incident electromagnetic signals, and a reading system that analyzes backscattered signals to determine these frequencies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single antenna is used with one MEMS resonator, then the device complexity is reduced, but the measurement precision and environmental robustness deteriorate due to sensitivity of the antenna resonance frequency to external conditions

Engineering Contradiction:
Improvedevice complexityVSAvoidmeasurement precision
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent divides the sensing function into multiple independent MEMS resonators, each with a distinct resonance frequency range. This segmentation allows the system to differentiate between antenna resonance effects and actual sensor responses, thereby improving measurement precision while maintaining a relatively simple single-antenna structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes parameter changes by operating multiple MEMS resonators at different resonance frequencies. The reading system applies incident electromagnetic signals at these specific frequencies and analyzes the backscattered signals to distinguish between antenna resonance and sensor responses, thereby achieving accurate measurements despite environmental variations.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If multiple MEMS resonators are integrated on a single antenna, then the measurement precision and environmental robustness are improved, but the device complexity increases

Engineering Contradiction:
Improvemeasurement precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent makes the single antenna serve multiple functions by integrating it with multiple MEMS resonators that have different resonance frequency ranges. The antenna simultaneously couples with all resonators and enables reading of multiple physical quantities, achieving multi-functionality without requiring multiple antennas, thus limiting the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent resolves the complexity issue by transitioning to another dimension in the frequency domain. Instead of spatially separating multiple antennas, the system differentiates between resonators by their operating frequencies. The reading system applies incident signals at specific frequencies and analyzes backscattered responses, enabling multiple sensors to share a single antenna through frequency multiplexing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Length of stationary object

If LC resonant circuit sensors are used, then the reading distance is extended beyond very short ranges, but the precision deteriorates due to short reading distance limitations of less than 10 cm

Engineering Contradiction:
Improvereading distanceVSAvoidmeasurement precision
Core Design Contradiction:
Length of stationary objectVSMeasurement precision

Solution Approach 1:

The patent employs mechanical vibration of MEMS resonators that are remotely powered by electromagnetic coupling with a single antenna. The resonators vibrate at their natural frequencies when excited by incident electromagnetic signals, and this mechanical vibration is used to encode sensor information. The system achieves both extended reading distance and high precision by detecting the resonant frequency shifts of the mechanically vibrating MEMS structures.

Inventive Principle:
Principle #18Mechanical vibration

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables improved precision and reduced bulk in measuring multiple physical quantities, with enhanced robustness against environmental conditions, by utilizing multiple MEMS resonators on a single antenna to accurately determine resonance frequencies and corresponding physical quantities.

Implementation Method 1

each of the at least two resonant microelectromechanical, MEMS, components having a specific mechanical resonance frequency belonging to a range of resonance frequencies, the ranges of resonance frequencies associated with two distinct MEMS components being disjoint

Methodology Applied
Scientific EffectNon-linear actuation:

Implementation Method 2

the or each antenna comprises at least two resonant microelectromechanical, MEMS, components with non-linear actuation, each of said MEMS components having a specific mechanical resonance frequency

Methodology Applied
Scientific EffectMechanical resonance: Resonance

Implementation Method 3

forming an antenna-resonator assembly adapted to receive an incident electromagnetic signal comprising at least two frequencies and to emit a backscattered electromagnetic signal

Methodology Applied
Scientific EffectElectromagnetic backscattering: Scattering

Data Source

PatentEP4304008A1Passive wireless electronic component and reading system thereof
Publication Date: 2024.01.10 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP4304008A1 patent drawingFigure 1
  • EP4304008A1 patent drawingFigure 2
  • EP4304008A1 patent drawingFigure 3

AI summary

The invention relates to a passive wireless electronic component (2) comprising at least one antenna (14), the antenna or antennas having an associated antenna frequency, and comprising at least one resonant microelectromechanical component, having a resonant frequency and connected to a contact point of said antenna, forming an antenna-resonator assembly adapted to receive an incident electromagnetic signal (Si) comprising at least two frequencies and to emit a backscattered electromagnetic signal (Sr). This passive wireless electronic component (2) is such that the antenna or antennas (14) comprise at least two non-linear actuation resonant MEMS microelectromechanical components (16, 18), each of said MEMS components having its own mechanical resonant frequency belonging to a range of resonant frequencies, the resonant frequency ranges associated with two distinct MEMS components being disjoint.