Wireless MEMS Pressure Sensor with Built-in Calibration
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Solution Overview
Problem
Traditional MEMS pressure sensors require labor-intensive and costly periodic recalibration, limiting their use in remote applications where manual calibration is impractical.
Innovation Solution
A wireless MEMS pressure sensor with built-in calibration, incorporating an integrated sensor/actuator subsystem and wireless communication, allows for automated calibration using electrically driven actuators to generate a digitally controlled force, enabling wireless transmission of measurement and calibration data for remote processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional manual calibration method is used, then measurement accuracy can be maintained, but labor cost and time consumption increase significantly
Solution Approach 1:
The pressure sensor system performs self-calibration using built-in actuators that generate reference pressure without external intervention. The sensor automatically compares its readings against the actuator-generated reference and adjusts its output, eliminating the need for manual calibration operations while maintaining measurement accuracy.
Solution Approach 2:
The calibration reference pressure is generated in advance by the integrated actuators before actual measurement operations begin. This preliminary generation of reference pressure allows the sensor to be pre-calibrated and ready for immediate accurate measurements without requiring time-consuming manual calibration procedures.
2Measurement precision
If traditional manual calibration method is used, then measurement accuracy can be maintained, but labor cost increases
Solution Approach 1:
The pressure sensor system performs self-calibration using built-in actuators that generate reference pressure without external intervention. The sensor automatically compares its readings against the actuator-generated reference and adjusts its output, eliminating the need for manual calibration operations while maintaining measurement accuracy.
Solution Approach 2:
The patent uses electrically driven actuators that consume minimal energy and have simple construction compared to traditional calibration equipment. These actuators can be manufactured at low cost using standard MEMS processes, making the overall calibration system economically viable despite the added complexity of integration.
3Adaptability or versatility
If wireless MEMS pressure sensor is deployed in remote applications, then application versatility improves, but calibration becomes impractical
Solution Approach 1:
The pressure sensor system performs self-calibration using built-in actuators that generate reference pressure without external intervention. The sensor automatically compares its readings against the actuator-generated reference and adjusts its output, eliminating the need for manual calibration operations while maintaining measurement accuracy.
Solution Approach 2:
The calibration function is segmented into independent electrical actuator components that can operate autonomously within the sensor package. This segmentation allows the calibration function to be separated from manual operations and performed automatically by dedicated actuator elements driven by electrical signals.
4Extent of automation
If built-in actuator is integrated into pressure sensor, then automated calibration is enabled, but device complexity increases
Solution Approach 1:
The calibration actuators are merged with the pressure sensor structure in an integrated MEMS device. The actuators and sensing elements share common structural components and fabrication processes, combining multiple functions into a single unified device that reduces overall system complexity despite adding automation capabilities.
Solution Approach 2:
The integrated actuators serve multiple functions: they generate reference pressure for calibration, can apply test pressures for sensor characterization, and may assist in packaging or sealing operations. This multi-functionality justifies the added complexity by providing several useful capabilities from a single integrated component.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and efficient self-calibration of pressure sensors, reducing labor and costs, and facilitating their use in remote applications by providing accurate absolute pressure measurements.
Implementation Method 1
electrically driven actuators built within the system can be utilized as independent force sources for providing automated calibration of the pressure sensor
Data Source
AI summary
A wireless microelectromechanical system (MEMS) pressure sensor with built in calibration. An actuator is coupled with a pressure sensing device to enable the pressure to be calibrated against the known pressure exerted by the actuator. The sensing component is configured to flex under the application of force to a pure bending condition, i.e., the sensing component flexes with no or insignificant shear forces in the sensing component.